| M&NEMS: A new approach for ultra-low cost 3D inertial sensor P Robert, V Nguyen, S Hentz, L Duraffourg, G Jourdan, J Arcamone, ... SENSORS, 2009 IEEE, 963-966, 2009 | 94 | 2009 |
| Tunable bulk acoustic wave MEMS micro-resonator P Robert US Patent 7,592,739, 2009 | 87 | 2009 |
| Novel Si-based nanowire devices: Will they serve ultimate MOSFETs scaling or ultimate hybrid integration? T Ernst, L Duraffourg, C Dupre, E Bernard, P Andreucci, S Becu, E Ollier, ... 2008 IEEE International Electron Devices Meeting, 1-4, 2008 | 86 | 2008 |
| Integrated RF-MEMS switch based on a combination of thermal and electrostatic actuation P Robert, D Saias, C Billard, S Boret, N Sillon, C Maeder-Pachurka, ... TRANSDUCERS'03. 12th International Conference on Solid-State Sensors …, 2003 | 81 | 2003 |
| 3D magnetic field sensor concept for use in inertial measurement units (IMUs) D Ettelt, P Rey, G Jourdan, A Walther, P Robert, J Delamare Journal of Microelectromechanical Systems 23 (2), 324-333, 2013 | 65 | 2013 |
| Triaxial membrane accelerometer P Robert, S Hentz US Patent 7,600,428, 2009 | 60 | 2009 |
| An above ic mems rf switch D Saias, P Robert, S Boret, C Billard, G Bouche, D Belot, P Ancey IEEE Journal of Solid-State Circuits 38 (12), 2318-2324, 2003 | 60 | 2003 |
| El Manual Merck B Mark, P Robert, J Thomas, K Justin, B Michael Madrid: Elselvier 1, 11, 2007 | 49 | 2007 |
| 1.3 mm2 Nav-Grade NEMS-Based Gyroscope M Gadola, A Buffoli, M Sansa, A Berthelot, P Robert, G Langfelder Journal of Microelectromechanical Systems 30 (4), 513-520, 2021 | 42 | 2021 |
| Encapsulation in a hermetic cavity of a microelectronic composite, particularly of a MEMS P Robert US Patent 7,723,141, 2010 | 42 | 2010 |
| Electrostatic motor P Robert, JS Danel, B Diem US Patent 5,965,968, 1999 | 42 | 1999 |
| Method for producing via-connections in a substrate and substrate equipped with same P Robert US Patent 6,756,304, 2004 | 41 | 2004 |
| Resonant inertial microsensor with variable thickness produced by surface engineering P Robert, L Duraffour US Patent 8,783,107, 2014 | 40 | 2014 |
| 3-axis gyroscope with Si nanogage piezo-resistive detection A Walther, M Savoye, G Jourdan, P Renaux, F Souchon, P Robert, ... 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems …, 2012 | 40 | 2012 |
| MEMS dynamic pressure sensor, in particular for applications to microphone production P Robert, A Walther US Patent 8,783,113, 2014 | 35 | 2014 |
| Magnetic field sensor with suspended stress gauge A Walther, P Robert, O Redon US Patent 8,847,589, 2014 | 31 | 2014 |
| Bulk acoustic resonator with matched resonance frequency and fabrication process P Robert, P Ancey, G Caruyer US Patent 7,310,029, 2007 | 30 | 2007 |
| Self-oscillation conditions of a resonant nanoelectromechanical mass sensor E Colinet, L Duraffourg, S Labarthe, S Hentz, P Robert, P Andreucci Journal of Applied Physics 105 (12), 2009 | 29 | 2009 |
| Micro-gyrometer with frequency detection P Robert US Patent 7,389,690, 2008 | 29 | 2008 |
| Temperature-compensated structure for SAW pressure sensor in very high temperature H Trang, R Patrice, V Marie-Helene, D Jean-Sebastien, R Philippe, ... 2007 IEEE International Frequency Control Symposium Joint with the 21st …, 2007 | 27 | 2007 |
