B Ilahi, Z Zaâboub, B Salem, D Morris, V Aimez, L Sfaxi, H Maaref

2009/4/30

Materials Science in Semiconductor Processing

12

1

71-74

Pergamon

Low-temperature photoluminescence (PL) experiments have been carried out to investigate
In/Ga intermixing in InAs/GaAs self-assembled quantum dots (QDs) by studying the changes
in the optical properties of the system by rapid thermal annealing (RTA) and by room
temperature proton implantation at various doses followed by RTA. The study of the RTA
effect on the investigated structure shows that thermal stability can be ensured for an
annealing temperature below 675° C. For higher annealing temperatures, the thermal …