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Julien Arcamone
Julien Arcamone
ASM
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3-D sequential integration: A key enabling technology for heterogeneous co-integration of new function with CMOS
P Batude, T Ernst, J Arcamone, G Arndt, P Coudrain, PE Gaillardon
IEEE Journal on Emerging and Selected Topics in Circuits and Systems 2 (4 …, 2012
3422012
Gas sensors based on gravimetric detection—A review
S Fanget, S Hentz, P Puget, J Arcamone, M Matheron, ED Colinet, ...
Sensors and Actuators B: Chemical 160 (1), 804-821, 2011
2142011
Dynamic range enhancement of nonlinear nanomechanical resonant cantilevers for highly sensitive NEMS gas/mass sensor applications
N Kacem, J Arcamone, F Perez-Murano, S Hentz
Journal of Micromechanics and Microengineering 20 (4), 045023, 2010
1602010
M&NEMS: A new approach for ultra-low cost 3D inertial sensor
P Robert, V Nguyen, S Hentz, L Duraffourg, G Jourdan, J Arcamone, ...
SENSORS, 2009 IEEE, 963-966, 2009
942009
3D Sequential Integration: Application-driven technological achievements and guidelines
P Batude, L Brunet, C Fenouillet-Beranger, F Andrieu, JP Colinge, ...
2017 IEEE International Electron Devices Meeting (IEDM), 3.1. 1-3.1. 4, 2017
912017
Full-wafer fabrication by nanostencil lithography of micro/nanomechanical mass sensors monolithically integrated with CMOS
J Arcamone, MAF Van Den Boogaart, F Serra-Graells, J Fraxedas, ...
Nanotechnology 19 (30), 305302, 2008
772008
Evaporation of femtoliter sessile droplets monitored with nanomechanical mass sensors
J Arcamone, E Dujardin, G Rius, F Perez-Murano, T Ondarcuhu
The Journal of Physical Chemistry B 111 (45), 13020-13027, 2007
762007
A compact and low-power CMOS circuit for fully integrated NEMS resonators
J Arcamone, B Misischi, F Serra-Graells, MAF van den Boogaart, ...
IEEE Transactions on Circuits and Systems II: Express Briefs 54 (5), 377-381, 2007
502007
Micro/nanomechanical resonators for distributed mass sensing with capacitive detection
J Arcamone, G Rius, G Abadal, J Teva, N Barniol, F Pérez-Murano
Microelectronic Engineering 83 (4-9), 1216-1220, 2006
472006
VLSI silicon multi-gas analyzer coupling gas chromatography and NEMS detectors
J Arcamone, A Niel, V Gouttenoire, M Petitjean, N David, R Barattin, ...
IEDM-2011 IEEE International Electron Devices Meeting, 669-672, 2011
422011
Nanomechanical mass sensor for spatially resolved ultrasensitive monitoring of deposition rates in stencil lithography
J Arcamone, M Sansa, J Verd, A Uranga, G Abadal, N Barniol, ...
Small 5 (2), 176-180, 2009
412009
Efficient capacitive transduction of high-frequency micromechanical resonators by intrinsic cancellation of parasitic feedthrough capacitances
J Arcamone, E Colinet, A Niel, E Ollier
Applied Physics Letters 97 (4), 2010
382010
Dynamic stencil lithography on full wafer scale
V Savu, MAF van den Boogaart, J Brugger, J Arcamone, M Sansa, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2008
312008
Ultra-scaled high-frequency single-crystal Si NEMS resonators and their front-end co-integration with CMOS for high sensitivity applications
E Ollier, C Dupré, G Arndt, J Arcamone, C Vizioz, L Duraffourg, E Sage, ...
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems …, 2012
262012
Electron-and ion-beam lithography for the fabrication of nanomechanical devices integrated on CMOS circuits
G Rius, J Llobet, J Arcamone, X Borrisé, F Pérez-Murano
Microelectronic engineering 86 (4-6), 1046-1049, 2009
252009
16kbit 1T1R OxRAM arrays embedded in 28nm FDSOI technology demonstrating low BER, high endurance, and compatibility with core logic transistors
L Grenouillet, N Castellani, A Persico, V Meli, S Martin, O Billoint, ...
2021 IEEE International Memory Workshop (IMW), 1-4, 2021
232021
Modeling and design of a fully integrated gas analyzer using a μGC and NEMS sensors
O Martin, V Gouttenoire, P Villard, J Arcamone, M Petitjean, G Billiot, ...
Sensors and Actuators B: Chemical 194, 220-228, 2014
222014
100 MHz oscillator based on a low polarization voltage capacitive Lamé-mode MEMS resonator
E Colinet, J Arcamone, A Niel, E Lorent, S Hentz, E Ollier
2010 IEEE International Frequency Control Symposium, 174-178, 2010
212010
Nanoelectromechanical systems
L Duraffourg, J Arcamone
John Wiley & Sons, 2015
202015
Fully monolithic and ultra-compact NEMS-CMOS self-oscillator based-on single-crystal silicon resonators and low-cost CMOS circuitry
J Philippe, G Arndt, E Colinet, M Savoye, T Ernst, E Ollier, J Arcamone
2014 IEEE 27th International Conference on Micro Electro Mechanical Systems …, 2014
202014
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