Effect of low dose high energy implantation on refractive index and linear electro-optic properties in X-cut Planar optical waveguide formation and … GG Bentini, M Bianconi, M Chiarini, L Correra, C Sada, P Mazzoldi, ...
Journal of applied physics 92 (11), 6477-6483, 2002
171 2002 Defects introduced in silicon wafers during rapid isothermal annealing: Thermoelastic and thermoplastic effects GG Bentini, L Correra, C Donolato
Journal of applied physics 56 (10), 2922-2929, 1984
151 1984 Titanium silicide formation: Effect of oxygen distribution in the metal film M Berti, AV Drigo, C Cohen, J Siejka, GG Bentini, R Nipoti, S Guerri
Journal of applied physics 55 (10), 3558-3565, 1984
128 1984 Damage effects produced in the near-surface region of x-cut by low dose, high energy implantation of nitrogen, oxygen, and fluorine ions GG Bentini, M Bianconi, L Correra, M Chiarini, P Mazzoldi, C Sada, ...
Journal of applied physics 96 (1), 242-247, 2004
116 2004 Growth and structure of titanium silicide phases formed by thin Ti films on Si crystals GG Bentini, R Nipoti, A Armigliato, M Berti, AV Drigo, C Cohen
Journal of Applied Physics 57 (2), 270-275, 1985
79 1985 Determination of He electronic energy loss in crystalline Si by Monte-Carlo simulation of Rutherford backscattering–channeling spectra G Lulli, E Albertazzi, M Bianconi, GG Bentini, R Nipoti, R Lotti
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2000
64 2000 Surface doping of semiconductors by pulsed-laser irradiation in reactive atmosphere GG Bentini, M Bianconi, C Summonte
Applied physics A 45, 317-324, 1988
56 1988 Analysis of thermal stresses induced in silicon during xenon arc lamp flash annealing GG Bentini, L Correra
Journal of Applied Physics 54 (4), 2057-2062, 1983
48 1983 Integrated Mach-Zehnder micro-interferometer on LiNbO3 GG Bentini, M Bianconi, A Cerutti, M Chiarini, G Pennestri, C Sada, ...
Optics and lasers in engineering 45 (3), 368-372, 2007
43 2007 Titanium and nickel silicide formation after Q ‐switched laser and multiscanning electron beam irradiation GG Bentini, M Servidori, C Cohen, R Nipoti, AV Drigo
Journal of Applied Physics 53 (3), 1525-1531, 1982
43 1982 On the dynamics of the damage growth in 5 MeV oxygen-implanted lithium niobate M Bianconi, N Argiolas, M Bazzan, GG Bentini, M Chiarini, A Cerutti, ...
Applied Physics Letters 87 (7), 2005
36 2005 Step-index optical waveguide produced by multi-step ion implantation in LiNbO3 GB Montanari, P De Nicola, S Sugliani, A Menin, A Parini, A Nubile, ...
Optics express 20 (4), 4444-4453, 2012
35 2012 Axial-to planar-channeling transition G Della Mea, AV Drigo, SL Russo, P Mazzoldi, GG Bentini, A Desalvo, ...
Physical Review B 7 (9), 4029, 1973
31 1973 Multiscanning electron beam annealing of phosphorus‐implanted silicon GG Bentini, R Galloni, R Nipoti
Applied Physics Letters 36 (8), 661-663, 1980
30 1980 Channeled and random proton stopping power in the 30-1000 keV energy range A Carnera, G Della Mea, AV Drigo, SL Russo, P Mazzoldi, GG Bentini
Physical Review B 17 (9), 3492, 1978
30 1978 Energy Loss of H, D, and Ions Channeled Through Thin single Crystals of Silicon G Della Mea, AV Drigo, SL Russo, P Mazzoldi, GG Bentini
Physical Review Letters 27 (18), 1194, 1971
30 1971 Defect engineering and micromachining of Lithium Niobate by ion implantation M Bianconi, GG Bentini, M Chiarini, P De Nicola, GB Montanari, A Nubile, ...
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2009
27 2009 Fabrication of Smooth Ridge Optical Waveguides in by Ion Implantation-Assisted Wet Etching P De Nicola, S Sugliani, GB Montanari, A Menin, P Vergani, A Meroni, ...
Journal of lightwave technology 31 (9), 1482-1487, 2013
26 2013 Matrix atomic losses and oxygen incorporation under ruby-laser irradiation of silicon in gaseous atmospheres M Berti, LFD Dalle Rose, AV Drigo, C Cohen, J Siejka, GG Bentini, ...
Physical Review B 34 (4), 2346, 1986
26 1986 The thermal oxidation of ion-implanted zirconium GG Bentini, M Berti, A Carnera, G Della Mea, AV Drigo, SL Russo, ...
Corrosion Science 20 (1), 27-39, 1980
26 1980