Residual stress measurement method in MEMS microbeams using frequency shift data A Soma, A Ballestra Journal of Micromechanics and Microengineering 19 (9), 095023, 2009 | 49 | 2009 |
Experimental characterization of electrostatically actuated in-plane bending of microcantilevers A Ballestra, E Brusa, M Gh Munteanu, A Soma Microsystem technologies 14, 909-918, 2008 | 33 | 2008 |
Experimental-numerical comparison of the cantilever MEMS frequency shift in presence of a residual stress gradient A Ballestra, A Somà, R Pavanello Sensors 8 (2), 767-783, 2008 | 30 | 2008 |
FEM modelling and experimental characterization of microbeams in presence of residual stress A Ballestra, E Brusa, G De Pasquale, MG Munteanu, A Soma Analog Integrated Circuits and Signal Processing 63, 477-488, 2010 | 29 | 2010 |
Effect of Residual Stress on the Mechanical Behaviour of Microswitches at Pull‐In A Somà, G De Pasquale, E Brusa, A Ballestra Strain 46 (4), 358-373, 2010 | 27 | 2010 |
Mechanical fatigue analysis of gold microbeams for RF-MEMS applications by pull-in voltage monitoring G De Pasquale, A Somà, A Ballestra Analog Integrated Circuits and Signal Processing 61, 215-222, 2009 | 23 | 2009 |
RF-MEMS beam components: FEM modelling and experimental identification of pull-in in presence of residual stress A Ballestra, E Brusa, G De Pasquale, MG Munteanu, A Somà 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, 232-235, 2008 | 14 | 2008 |
Mechanical fatigue on gold MEMS devices: Experimental results G De Pasquale, A Somà, A Ballestra 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, 11-15, 2008 | 9 | 2008 |
Experimental Characterization of the static behaviour of microcatntilevers electrostatically actuated A Ballestra, E Brusa, MG Munteanu, A Somà arXiv preprint arXiv:0802.3097, 2008 | 6 | 2008 |
Caratterizzazione sperimentale di microattuatori elettrostatici trabeiformi per applicazioni in radiofrequenza A Ballestra, E Brusa, MGH Munteanu, A Soma Titolo volume non avvalorato, 2007 | 3 | 2007 |
Reduced Order Modeling of the Squeeze Film Damping in MEMS A Soma, G Spinola, A Ballestra, A Pennetta Engineering Systems Design and Analysis 42495, 1003-1014, 2006 | 3 | 2006 |
Design of test structures for reduced order modeling of the squeeze film damping in MEMS A Soma, A Ballestra 2006 International Semiconductor Conference 2, 341-344, 2006 | 2 | 2006 |
Identificazione del comportamento dinamico di sensori MEMS G DE PASQUALE, A Ballestra Titolo volume non avvalorato, 321-322, 2008 | 1 | 2008 |
Modellazione e identificazione sperimentale del pull-in in presenza di stress residuo A Ballestra, E Brusa, G DE PASQUALE, MG Munteanu, A Soma Titolo volume non avvalorato, 325-326, 2008 | 1 | 2008 |
Mean stress effect on mechanical fatigue of MEMS under alternate loads G De Pasquale, A Ballestra, A Soma 2009 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS, 317-321, 2009 | | 2009 |
Analisi sperimentale del comportamento a fatica di microstrutture MEMS G DE PASQUALE, A Soma, A Ballestra XXXVIII Convegno Nazionale dell’Associazione Italiana per l’Analisi delle …, 2009 | | 2009 |
Experimental Characterization of the Static Behaviour of Out-of-plane Microcantilevers A Ballestra, E Brusa, G DE PASQUALE, M Munteanu, A Soma IEEE, DTIP 2008; CAD, Design and Test Conference, 1-4, 2008 | | 2008 |
Experimental-numerical comparison of the cantilever MEMS frequency shift in presence of a residual stress gradient A Soma, A Ballestra, R Pavanello SENSORS 8, 767-783, 2008 | | 2008 |
Allen, David Almond, Heather Asgari, Mohammad Bagher Aubry, Denis A Avram, M Avram, C Bailey, A Ballestra, E Barbarini, D Barbier, ... | | 2008 |
Experimental validation of modelling of the mechanincal behaviour of microbeam electrostatic actuators for radio-frequency MEMS A Soma, A Ballestra, E Brusa, F DE BONA, M Munteanu Titolo volume non avvalorato, 2007 | | 2007 |