| Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro-and nanostructures F Marty, L Rousseau, B Saadany, B Mercier, O Français, Y Mita, ... Microelectronics journal 36 (7), 673-677, 2005 | 374 | 2005 |
| Design, fabrication, and control of MEMS-based actuator arrays for air-flow distributed micromanipulation Y Fukuta, YA Chapuis, Y Mita, H Fujita Journal of Microelectromechanical Systems 15 (4), 912-926, 2006 | 124 | 2006 |
| Free-space tunable and drop optical filters using vertical Bragg mirrors on silicon B Saadany, M Malak, M Kubota, F Marty, Y Mita, D Khalil, T Bourouina IEEE journal of selected topics in quantum electronics 12 (6), 1480-1488, 2006 | 91 | 2006 |
| A silicon shadow mask for deposition on isolated areas A Tixier, Y Mita, JP Gouy, H Fujita Journal of Micromechanics and Microengineering 10 (2), 157, 2000 | 63 | 2000 |
| FPGA-based decentralized control of arrayed MEMS for microrobotic application YA Chapuis, L Zhou, Y Fukuta, Y Mita, H Fujita IEEE Transactions on Industrial Electronics 54 (4), 1926-1936, 2007 | 44 | 2007 |
| Micro-mirror device M Tsugai, N Konno, H Fujita, M Mita, H Toshiyoshi, Y Mita US Patent 6,259,548, 2001 | 41 | 2001 |
| Embedded-mask-methods for mm-scale multi-layer vertical/slanted Si structures Y Mita, M Mita, A Tixier, JP Gouy, H Fujita Proceedings IEEE Thirteenth Annual International Conference on Micro Electro …, 2000 | 40 | 2000 |
| Multiple-height microstructures fabricated by ICP-RIE and embedded masking layers M Mita, Y Mita, H Toshiyoshi, H Fujita IEEJ Transactions on Sensors and Micromachines 120 (11), 493-497, 2000 | 39 | 2000 |
| Conveyor for pneumatic two-dimensional manipulation realized by arrayed MEMS and its control Y Fukuta, M Yanada, A Ino, Y Mita, YA Chapuis, S Konishi, H Fujita Journal of Robotics and Mechatronics 16 (2), 163-170, 2004 | 38 | 2004 |
| Two dimensional micro conveyance system with through holes for electrical and fluidic interconnection Y Mita, S Konishi, H Fujita Proceedings of International Solid State Sensors and Actuators Conference …, 1997 | 38 | 1997 |
| Aspect ratio dependent scalloping attenuation in DRIE and an application to low-loss fiber-optical switches Y Mita, M Sugiyama, M Kubota, F Marty, T Bourouina, T Shibata 19th IEEE international conference on micro electro mechanical systems, 114-117, 2006 | 37 | 2006 |
| A zero-power sensing MEMS shock sensor with a latch-reset mechanism for multi-threshold events monitoring RR Reddy, K Komeda, Y Okamoto, E Lebrasseur, A Higo, Y Mita Sensors and Actuators A: Physical 295, 1-10, 2019 | 35 | 2019 |
| An intelligent action control system based on extended vector annotated logic program and its hardware implementation K Nakamatsu, Y Mita, T Shibata Intelligent Automation & Soft Computing 13 (3), 289-304, 2007 | 35 | 2007 |
| Method for fine pattern formation H Fujita, Y Mita, R Ohigashi, K Tsuchiya US Patent 6,767,473, 2004 | 29 | 2004 |
| Noninvasive localization of IGBT faults by high-sensitivity magnetic probe with RF stimulation NN Mai-Khanh, S Nakajima, T Iizuka, Y Mita, K Asada IEEE Transactions on Instrumentation and Measurement 67 (4), 745-753, 2018 | 26 | 2018 |
| Contour lithography methods for DRIE fabrication of nanometre–millimetre-scale coexisting microsystems Y Mita, M Kubota, T Harada, F Marty, B Saadany, T Bourouina, T Shibata Journal of Micromechanics and Microengineering 16 (6), S135, 2006 | 26 | 2006 |
| Demonstration of a wireless driven MEMS pond skater that uses EWOD technology Y Mita, Y Li, M Kubota, S Morishita, W Parkes, LI Haworth, BW Flynn, ... Solid-State Electronics 53 (7), 798-802, 2009 | 25 | 2009 |
| Thermal resonant zeolite-based gas sensor M Denoual, D Robbes, S Inoue, Y Mita, J Grand, H Awala, S Mintova Sensors and Actuators B: Chemical 245, 179-182, 2017 | 22 | 2017 |
| Increasing cell–device adherence using cultured insect cells for receptor-based biosensors D Terutsuki, H Mitsuno, T Sakurai, Y Okamoto, A Tixier-Mita, H Toshiyoshi, ... Royal Society Open Science 5 (3), 172366, 2018 | 19 | 2018 |
| Opportunities of CMOS-MEMS integration through LSI foundry and open facility Y Mita, E Lebrasseur, Y Okamoto, F Marty, R Setoguchi, K Yamada, I Mori, ... Japanese Journal of Applied Physics 56 (6S1), 06GA03, 2017 | 19 | 2017 |
