| Composition and optical properties tunability of hydrogenated silicon carbonitride thin films deposited by reactive magnetron sputtering A Bachar, A Bousquet, H Mehdi, G Monier, C Robert-Goumet, L Thomas, ... Applied Surface Science 444, 293-302, 2018 | 24 | 2018 |
| Effect of the silicon substrate nitridation on optical and electrical properties of silicon nitride thin films deposited by reactive magnetron sputtering. AF Bachar, A Bousquet, CR Goumet, G Monier, C Varenne, E Tomasella PLATHINIUM (Plasma Thin film International Union Meeting), 2019 | | 2019 |
| Silicon carbonitride thin films prepared by radiofrequency magnetron sputtering on Si (100) and nitrided Si (100) enhanced by an ECR plasma source. C Robert-Goumet, G Monier, A Bachar, E Tomasella, A Bousquet, ... 18th European Conference on Applications of Surface and Interface Analysis …, 2019 | | 2019 |
| Apport de l'excitation microonde ECR à la pulvérisation réactive pour le dépôt de couches minces SiCxNy˸ H, étude des propriétés optiques et électriques A Bachar Université Clermont Auvergne(2017-2020), 2019 | | 2019 |
Angelique BousquetICCF - UCAVerified email at uca.fr
