| Detection of sub-design rule physical defects using E-beam inspection OD Patterson, J Lee, DM Salvador, SCC Lei, X Tang IEEE Transactions on Semiconductor Manufacturing 26 (4), 476-481, 2013 | 73 | 2013 |
| Dynamic volume change measurements of cereal materials by environmental scanning electron microscopy and videomicroscopy X Tang, MR De Rooij, J Van Duynhoven, K Van Breugel Journal of microscopy 230 (1), 100-107, 2008 | 22 | 2008 |
| Quantitative measurements of charging in a gaseous environment X Tang, DC Joy Scanning: The Journal of Scanning Microscopies 25 (4), 194-200, 2003 | 13 | 2003 |
| In-line characterization of EDRAM for a FINFET technology using VC inspection OD Patterson, R Hafer, S Mittal, A Arya, K Stein, H Ho, W Davies, X Tang, ... 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC …, 2016 | 11 | 2016 |
| Volume change measurements of rice by environmental scanning electron microscopy and stereoscopy X Tang, M De Rooij, L De Jong Scanning: The Journal of Scanning Microscopies 29 (5), 197-205, 2007 | 9 | 2007 |
| An experimental model of beam broadening in the variable pressure scanning electron microscope X Tang, DC Joy Scanning 27 (6), 293-297, 2005 | 9 | 2005 |
| The merits of high landing energy for E-beam inspection OD Patterson, R Hafer, X Tang, SCC Lei 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC …, 2015 | 6 | 2015 |
| Solved: the mystery of bright voltage contrast word-line defects for SOI technology using nanoprobing OD Patterson, RF Hafer, S Pendyala, Z Song, BYL Hsieh, X Tang 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC …, 2017 | 4 | 2017 |
| The benefits of high landing energy for e-beam inspection OD Patterson, RF Hafer, X Tang, SCC Lei IEEE Transactions on Semiconductor Manufacturing 29 (4), 320-327, 2016 | 4 | 2016 |
| In-line Electron Beam Inspection of high aspect-ratio RMG FINFET gate RF Hafer, OD Patterson, C Gow, D McKindles, BYL Hsieh, X Tang International Symposium for Testing and Failure Analysis 81504, 380-385, 2017 | 3 | 2017 |
| E-beam inspection throughput acceleration via targeted critical area inspection OD Patterson, RO Topaloglu, RF Hafer, SCC Lei, X Tang 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC …, 2015 | 3 | 2015 |
| Rapid failure analysis of low-yielding electrical test structures using e-beam physical and voltage contrast inspection OD Patterson, DA Ryan, X Tang, SC Lei ISTFA 2013, 494-497, 2013 | 3 | 2013 |
| A novel technique for visualizing electron beam induced charging X Tang, DC Joy Scanning: The Journal of Scanning Microscopies 26 (5), 226-234, 2004 | 3 | 2004 |
| A Novel Technique for Visualizing Electron Beam Induced Charging X Tang, DC Joy Microscopy and Microanalysis 9 (S02), 980-981, 2003 | 2 | 2003 |
| Microstructure Dependence of Grain Boundary Corrosion in Oriented Aluminum Bicrystals ZQ Zhou, XH Tang, XL Yue Materials Science Forum 396, 1485-1490, 2002 | 1 | 2002 |
| Isotropism of compression yield strength in the deformed aluminum alloys ZQ Zhou, ZG Zheng, XH Tang Materials science forum 331, 1285-1290, 2000 | 1 | 2000 |
| In-Line Detection of Deep Trench Moat Underetch Defects Using eBeam Inspection RF Hafer, B Messenger, MT Dekker, OD Patterson, Y Feng, SC Lei, ... ISTFA 2015, 205-210, 2015 | | 2015 |
| Dynamic Volume Change Measurement in Environmental Scanning Electron Microscope X Tang, M De Rooij Microscopy and Microanalysis 12 (S02), 1500-1501, 2006 | | 2006 |
| Evidence for the Gaussian Scttering of Electrons in a Gas D Joy, X Tang Microscopy and Microanalysis 12 (S02), 170-171, 2006 | | 2006 |
| Measurement of Moisture Migration Kinetics in Environmental Scanning Electron Microscopy X Tang, M de Rooij MRS Online Proceedings Library (OPL) 982, 0982-KK07-10, 2006 | | 2006 |
