NbN multilayer technology on R-plane sapphire JC Villegirr, N Hadacek, S Monso, B Delnet, A Roussy, P Febvre, ...
IEEE transactions on applied superconductivity 11 (1), 68-71, 2001
55 2001 Virtual metrology models for predicting physical measurement in semiconductor manufacturing A Ferreira, A Roussy, L Condé
2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, 149-154, 2009
43 2009 Formation mechanisms of Cu (In, Ga) Se2 solar cells prepared from electrodeposited precursors F Oliva, C Broussillou, M Annibaliano, N Frederich, PP Grand, A Roussy, ...
Thin Solid Films 535, 127-132, 2013
35 2013 Virtual metrology modeling for cvd film thickness J Besnard, D Gleispach, H Gris, A Ferreira, A Roussy, C Kernaflen, ...
International Journal of Control Science and Engineering 2 (3), 26-33, 2012
34 2012 A structure data-driven framework for virtual metrology modeling WT Yang, J Blue, A Roussy, J Pinaton, MS Reis
IEEE Transactions on Automation Science and Engineering 17 (3), 1297-1306, 2019
21 2019 Tool condition diagnosis with a recipe-independent hierarchical monitoring scheme J Blue, D Gleispach, A Roussy, P Scheibelhofer
IEEE transactions on semiconductor manufacturing 26 (1), 82-91, 2012
20 2012 An interpretable unsupervised Bayesian network model for fault detection and diagnosis WT Yang, MS Reis, V Borodin, M Juge, A Roussy
Control Engineering Practice 127, 105304, 2022
16 2022 Virtual metrology models for predicting avera PECVD oxide film thickne A Ferreira, A Roussy, C Kernaflen, D Gleispach, G Hayderer, H Gris, ...
2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, 1-6, 2011
14 2011 A physics-informed Run-to-Run control framework for semiconductor manufacturing WT Yang, J Blue, A Roussy, J Pinaton, MS Reis
Expert Systems with Applications 155, 113424, 2020
12 2020 Feedforward Run-to-Run Control for Reduced Parametric Transistor Variation in CMOS Logic 0.13 N Jedidi, P Sallagoity, A Roussy, S Dauzère-Pérès
IEEE transactions on semiconductor manufacturing 24 (2), 273-279, 2011
12 2011 Efficient FDC based on hierarchical tool condition monitoring scheme J Blue, A Roussy, A Thieullen, J Pinaton
2012 SEMI Advanced Semiconductor Manufacturing Conference, 359-364, 2012
11 2012 On-chip high-frequency diagnostic of RSFQ logic cells PS Febvre, JC Berthet, D Ney, A Roussy, JW Tao, G Angenieux, ...
IEEE Transactions on Applied Superconductivity 11 (1), 284-287, 2001
9 2001 HTS pulse-stretcher and second order modulator: Design and first results A Roussy, S Karthikeyan, I Oomen, T Ortlepp, EH Sujiono, A Brinkman, ...
IEEE transactions on applied superconductivity 15 (2), 457-460, 2005
7 2005 Virtual metrology for semiconductor manufacturing: Focus on transfer learning R Clain, V Borodin, M Juge, A Roussy
2021 IEEE 17th International conference on automation science and …, 2021
6 2021 A hybrid feature selection approach for virtual metrology: Application to CMP process TE KORABI, V BORODIN, J Michel, A ROUSSY
2021 32nd Annual SEMI advanced semiconductor manufacturing conference (ASMC …, 2021
6 2021 Virtual metrology modeling based on gaussian bayesian network WT Yang, J Blue, A Roussy, MS Reis, J Pinaton
2018 Winter Simulation Conference (WSC), 3574-3582, 2018
5 2018 Run-To-Run sensor variation monitoring for process fault diagnosis in semiconductor manufacturing J Blue, A Roussy, J Pinaton
2016 Winter Simulation Conference (WSC), 2523-2534, 2016
4 2016 Critical sensitivity of flash gate dimension spread on electrical performances for advanced embedded memory A Roussy, M Bocquet, M Bileci, S Bégouin, A Marchadier
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC …, 2015
4 2015 Implementation of MIMO R2R control regulation on furnaces processes B Richard, A Roussy, L Brun, D Pompier, C Alegret, J Pinaton
2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 143-148, 2010
4 2010 New developments in textured and epitaxial NbN superconducting layers for ultimate sensors and RSFQ digital circuits L Villégier, Hadacek, Jorel,Thomassin, Bouchiat, Faucher, Febvre, Roussy
J. Phys. IV 12 (3), 129 - 132, 2002
4 * 2002 