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Bastien Bruneau
Bastien Bruneau
Adresse e-mail validée de polytechnique.edu
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Strong ionization asymmetry in a geometrically symmetric radio frequency capacitively coupled plasma induced by sawtooth voltage waveforms
B Bruneau, T Gans, D O’Connell, A Greb, EV Johnson, JP Booth
Physical review letters 114 (12), 125002, 2015
1022015
Electron power absorption dynamics in capacitive radio frequency discharges driven by tailored voltage waveforms in CF4
S Brandt, B Berger, E Schüngel, I Korolov, A Derzsi, B Bruneau, ...
Plasma Sources Science and Technology 25 (4), 045015, 2016
562016
Effect of gas properties on the dynamics of the electrical slope asymmetry effect in capacitive plasmas: comparison of Ar, H2 and CF4
B Bruneau, T Lafleur, T Gans, D O’Connell, A Greb, I Korolov, A Derzsi, ...
Plasma Sources Science and Technology 25 (1), 01LT02, 2015
512015
Ion flux asymmetry in radiofrequency capacitively-coupled plasmas excited by sawtooth-like waveforms
B Bruneau, T Novikova, T Lafleur, JP Booth, EV Johnson
Plasma Sources Science and Technology 23 (6), 065010, 2014
502014
Power coupling mode transitions induced by tailored voltage waveforms in capacitive oxygen discharges
A Derzsi, B Bruneau, AR Gibson, E Johnson, D O’Connell, T Gans, ...
Plasma Sources Science and Technology 26 (3), 034002, 2017
392017
Control and optimization of the slope asymmetry effect in tailored voltage waveforms for capacitively coupled plasmas
B Bruneau, T Novikova, T Lafleur, JP Booth, EV Johnson
Plasma Sources Science and Technology 24 (1), 015021, 2014
392014
Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects
E Schüngel, I Korolov, B Bruneau, A Derzsi, E Johnson, D O’Connell, ...
Journal of Physics D: Applied Physics 49 (26), 265203, 2016
262016
Growth mechanisms study of microcrystalline silicon deposited by SiH4/H2 plasma using tailored voltage waveforms
B Bruneau, J Wang, JC Dornstetter, EV Johnson
Journal of Applied Physics 115 (8), 084901, 2014
262014
Understanding the amorphous-to-microcrystalline silicon transition in SiF4/H2/Ar gas mixtures
JC Dornstetter, B Bruneau, P Bulkin, EV Johnson, P Roca i Cabarrocas
The Journal of Chemical Physics 140 (23), 234706, 2014
212014
Controlling the shape of the ion energy distribution at constant ion flux and constant mean ion energy with tailored voltage waveforms
B Bruneau, T Lafleur, JP Booth, E Johnson
Plasma Sources Science and Technology 25 (2), 025006, 2016
202016
Effect of ion energy on microcrystalline silicon material and devices: a study using tailored voltage waveforms
B Bruneau, M Lepecq, J Wang, JC Dornstetter, JL Maurice, EV Johnson
IEEE Journal of Photovoltaics 4 (6), 1354-1360, 2014
172014
Ion energy threshold in low-temperature silicon epitaxy for thin-film crystalline photovoltaics
B Bruneau, R Cariou, JC Dornstetter, M Lepecq, JL Maurice, ...
IEEE Journal of photovoltaics 4 (6), 1361-1367, 2014
172014
Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases
Z Donkó, A Derzsi, I Korolov, P Hartmann, S Brandt, J Schulze, B Berger, ...
Plasma Physics and Controlled Fusion 60 (1), 014010, 2017
152017
Slope and amplitude asymmetry effects on low frequency capacitively coupled carbon tetrafluoride plasmas
B Bruneau, I Korolov, T Lafleur, T Gans, D O'Connell, A Greb, A Derzsi, ...
Journal of Applied Physics 119 (16), 163301, 2016
152016
Material and growth mechanism studies of microcrystalline silicon deposited from SiF4/H2/Ar gas mixtures
JC Dornstetter, J Wang, B Bruneau, EV Johnson, P Roca i Cabarrocas
Canadian Journal of Physics 92 (7/8), 740-743, 2014
152014
Excitation of Ar, O2, and SF6/O2 plasma discharges using tailored voltage waveforms: control of surface ion bombardment energy and determination of the dominant electron …
G Fischer, K Ouaras, E Drahi, B Bruneau, EV Johnson
Plasma Sources Science and Technology 27 (7), 074003, 2018
112018
Capacitively coupled hydrogen plasmas sustained by tailored voltage waveforms: excitation dynamics and ion flux asymmetry
B Bruneau, P Diomede, DJ Economou, S Longo, T Gans, D O’Connell, ...
Plasma Sources Science and Technology 25 (4), 045019, 2016
102016
Capacitively coupled hydrogen plasmas sustained by tailored voltage waveforms: vibrational kinetics and negative ions control
P Diomede, B Bruneau, S Longo, E Johnson, JP Booth
Plasma Sources Science and Technology 26 (7), 075007, 2017
72017
Maskless and contactless patterned silicon deposition using a localized PECVD process
R Leal, B Bruneau, P Bulkin, T Novikova, F Silva, N Habka, EV Johnson
Plasma Sources Science and Technology 29 (2), 025023, 2020
52020
High efficiency thin film solar cells deposited at the amorphous-tomicrocrystalline transition using SiF4/H2/Ar gas mixtures
JC Dornstetter, B Bruneau, P Bulkin, EV Johnson, PR i Cabarrocas
2014 IEEE 40th Photovoltaic Specialist Conference (PVSC), 2839-2841, 2014
42014
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