Suivre
Lei Sun
Lei Sun
Globalfoundries, University of Rochester, Nankai University
Adresse e-mail validée de globalfoundries.com
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Année
All-fiber optical magnetic-field sensor based on Faraday rotation in highly terbium-doped fiber
L Sun, S Jiang, JR Marciante
Optics express 18 (6), 5407-5412, 2010
2122010
A 7nm FinFET technology featuring EUV patterning and dual strained high mobility channels
R Xie, P Montanini, K Akarvardar, N Tripathi, B Haran, S Johnson, T Hook, ...
2016 IEEE international electron devices meeting (IEDM), 2.7. 1-2.7. 4, 2016
1752016
Compact all-fiber optical Faraday components using 65-wt%-terbium–doped fiber with a record Verdet constant of− 32 rad/(Tm)
L Sun, S Jiang, JR Marciante
Optics express 18 (12), 12191-12196, 2010
762010
Effective Verdet constant in a terbium-doped-core phosphate fiber
L Sun, S Jiang, JD Zuegel, JR Marciante
Optics letters 34 (11), 1699-1701, 2009
512009
All-fiber optical isolator based on Faraday rotation in highly terbium-doped fiber
L Sun, S Jiang, JD Zuegel, JR Marciante
Optics letters 35 (5), 706-708, 2010
492010
Line-edge roughness performance targets for EUV lithography
TA Brunner, X Chen, A Gabor, C Higgins, L Sun, CA Mack
Extreme Ultraviolet (EUV) Lithography VIII 10143, 48-57, 2017
452017
Insertion strategy for EUV lithography
O Wood, J Arnold, T Brunner, M Burkhardt, JHC Chen, D Civay, SSC Fan, ...
Extreme Ultraviolet (EUV) Lithography III 8322, 32-39, 2012
402012
EUV patterning successes and frontiers
N Felix, D Corliss, K Petrillo, N Saulnier, Y Xu, L Meli, H Tang, A De Silva, ...
Extreme Ultraviolet (EUV) Lithography VII 9776, 480-486, 2016
392016
Scattering enhanced thin absorber for EUV reticle and a method of making
L Sun, IIOR Wood
US Patent 9,298,081, 2016
372016
Fabry-perot thin absorber for euv reticle and a method of making
L Sun, IIOR Wood
US Patent App. 13/788,315, 2014
352014
Switchable and tunable dual-wavelength erbium-doped fiber laser based on one fiber Bragg grating
X Feng, L Sun, L Xiong, Y Liu, S Yuan, G Kai, X Dong
Optical Fiber Technology 10 (3), 275-282, 2004
302004
Beating frequency tunable dual-wavelength erbium-doped fiber laser with one fiber Bragg grating
L Sun, X Feng, W Zhang, L Xiong, Y Liu, G Kai, S Yuan, X Dong
IEEE Photonics Technology Letters 16 (6), 1453-1455, 2004
302004
Intergrated circuit structure including single diffusion break abutting end isolation region, and methods of forming same
Y Shi, L Sun, L Economikos, R Xie, L Liebmann, C Park, ...
US Patent 10,388,652, 2019
212019
Comparison of left and right side line edge roughness in lithography
L Sun, N Saulnier, G Beique, E Verduijn, W Wang, Y Xu, H Tang, Y Chen, ...
Metrology, Inspection, and Process Control for Microlithography XXX 9778 …, 2016
212016
Thin absorber extreme ultraviolet photomask based on Ni–TaN nanocomposite material
D Hay, P Bagge, I Khaw, L Sun, O Wood, Y Chen, R Kim, ZJ Qi, Z Shi
Optics Letters 41 (16), 3791-3794, 2016
192016
Metal-insulator-metal capacitors with dielectric inner spacers
X Zhang, C Park, L Sun, Y Qi, R Augur
US Patent 10,211,147, 2019
182019
EUV processing and characterization for BEOL
N Saulnier, Y Xu, W Wang, L Sun, LL Cheong, R Lallement, G Beique, ...
Extreme Ultraviolet (EUV) Lithography VI 9422, 234-245, 2015
182015
Extreme ultraviolet masks having annealed light-absorptive borders and associated fabrication methods
P Mangat, L Sun, O Kritsun
US Patent 8,592,103, 2013
182013
Line edge roughness frequency analysis for SAQP process
L Sun, X Zhang, S Levi, A Ge, H Zhou, W Wang, N Krishnan, Y Chen, ...
Optical Microlithography XXIX 9780, 247-252, 2016
172016
Single-expose patterning development for EUV lithography
A De Silva, K Petrillo, L Meli, JC Shearer, G Beique, L Sun, I Seshadri, ...
Extreme Ultraviolet (EUV) Lithography VIII 10143, 311-319, 2017
162017
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