| Properties of silicon nanoparticles embedded in SiNx deposited by microwave-PECVD F Delachat, M Carrada, G Ferblantier, JJ Grob, A Slaoui Nanotechnology 20 (41), 415608, 2009 | 58 | 2009 |
| Spectroscopic ellipsometry investigation of the optical properties of nanostructured Si/SiNx films AS Keita, AE Naciri, F Delachat, M Carrada, G Ferblantier, A Slaoui Journal of Applied Physics 107 (9), 2010 | 51 | 2010 |
| Effect of annealing treatments on photoluminescence and charge storage mechanism in silicon-rich SiN x :H films BS Sahu, F Delachat, A Slaoui, M Carrada, G Ferblantier, D Muller Nanoscale research letters 6, 1-10, 2011 | 47 | 2011 |
| Effect of the stoichiometry of Si-rich silicon nitride thin films on their photoluminescence and structural properties TV Torchynska, JLC Espinola, EV Hernandez, L Khomenkova, F Delachat, ... Thin Solid Films 581, 65-69, 2015 | 38 | 2015 |
| The structural and optical properties of SiO2/Si rich SiNx multilayers containing Si-ncs F Delachat, M Carrada, G Ferblantier, JJ Grob, A Slaoui, H Rinnert Nanotechnology 20 (27), 275608, 2009 | 19 | 2009 |
| Structural and optical properties of Si nanocrystals embedded in SiO2/SiNx multilayers F Delachat, M Carrada, G Ferblantier, A Slaoui, C Bonafos, S Schamm, ... Physica E: Low-dimensional Systems and Nanostructures 41 (6), 994-997, 2009 | 17 | 2009 |
| Thin film pc-Si by aluminium induced crystallization on metallic substrate F Delachat, F Antoni, P Prathap, A Slaoui, C Cayron, C Ducros EPJ Photovoltaics 4, 45102, 2013 | 11 | 2013 |
| X-ray characterization of contact holes for block copolymer lithography DF Sunday, F Delachat, A Gharbi, G Freychet, CD Liman, R Tiron, ... Journal of applied crystallography 52 (1), 106-114, 2019 | 10 | 2019 |
| Dielectric functions of PECVD-grown silicon nanoscale inclusions within rapid thermal annealed silicon-rich silicon nitride films AS Keita, AE Naciri, F Delachat, M Carrada, G Ferblantier, A Slaoui, ... Thin Solid Films 519 (9), 2870-2873, 2011 | 10 | 2011 |
| Process highlights to enhance directed self-assembly contact patterning performances A Gharbi, R Tiron, M Argoud, G Chamiot-Maitral, A Fouquet, C Lapeyre, ... Journal of Micro/Nanolithography, MEMS, and MOEMS 15 (4), 043503-043503, 2016 | 8 | 2016 |
| Fabrication of buckling free ultrathin silicon membranes by direct bonding with thermal difference F Delachat, C Constancias, F Fournel, C Morales, B Le Drogoff, M Chaker, ... ACS nano 9 (4), 3654-3663, 2015 | 7 | 2015 |
| Advanced surface affinity control for DSA contact hole shrink applications F Delachat, A Gharbi, PP Barros, M Argoud, C Lapeyre, S Bos, J Hazart, ... Emerging Patterning Technologies 10144, 95-103, 2017 | 6 | 2017 |
| Determination of spot size and acid diffusion length in positive chemically amplified resist for e-beam lithography at 100 and 5 kV F Delachat, C Constancias, J Reche, B Dal'Zotto, L Pain, B Le Drogoff, ... Journal of Vacuum Science & Technology B 32 (6), 2014 | 6 | 2014 |
| Fabrication of high aspect ratio tungsten nanostructures on ultrathin c-Si membranes for extreme UV applications F Delachat, B Le Drogoff, C Constancias, S Delprat, E Gautier, M Chaker, ... Nanotechnology 27 (2), 025304, 2015 | 5 | 2015 |
| Ellipsometric demonstration of the existence of a strong correlation between size distribution and optical responses of silicon nanoclusters in a nitride matrix AS Keita, A En Naciri, F Delachat, M Carrada, G Ferblantier, A Slaoui Applied Physics Letters 99 (13), 2011 | 5 | 2011 |
| Dielectric functions of Si nanoparticles within a silicon nitride matrix AS Keita, AE Naciri, F Delachat, M Carrada, G Ferblantier, A Slaoui physica status solidi c 7 (2), 418-422, 2010 | 5 | 2010 |
| Elaboration and characterization of Si-licon nanoparticles in silicon nitride for photovoltaic application F Delachat Ph. D. Thesis, ESS-University of Strasbourg, France, 2010 | 5 | 2010 |
| Dependencies of bias tables to pattern density, critical dimension, global coordinates and pattern orientation for nanoimprint master manufacturing for the 200 mm wafer scale … P Quemere, J Chartoire, F Delachat, F Boudaa, L Perraud, M May, ... Design-Process-Technology Co-optimization for Manufacturability XII 10588, 47-54, 2018 | 4 | 2018 |
| Determination of the optical properties and size dispersion of Si nanoparticles within a dielectric matrix by spectroscopic ellipsometry AS Keita, AE Naciri, Y Battie, F Delachat, M Carrada, G Ferblantier, ... Journal of Applied Physics 116 (10), 2014 | 4 | 2014 |
| Evaluation of anti-sticking layers performances for 200mm wafer scale Smart NILTM process through surface and defectivity characterizations F Delachat, JC Phillipe, V Larrey, F Fournel, S Bos, H Teyssèdre, ... Advances in Patterning Materials and Processes XXXV 10586, 119-126, 2018 | 3 | 2018 |
