Jakey Blue
Jakey Blue
Science of Fabrication and Logistics, Centre Microélectronique de Provence, École des Mines de Saint
Adresse e-mail validée de ntu.edu.tw
Titre
Citée par
Citée par
Année
Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook
C Yugma, J Blue, S Dauzère-Pérès, A Obeid
Journal of Scheduling 18 (2), 195-205, 2015
472015
Performance analysis of demand planning approaches for aggregating, forecasting and disaggregating interrelated demands
A Chen, J Blue
International Journal of Production Economics 128 (2), 586-602, 2010
422010
Recipe-independent indicator for tool health diagnosis and predictive maintenance
A Chen, J Blue
IEEE Transactions on Semiconductor Manufacturing 22 (4), 522-535, 2009
372009
Translation-invariant multiscale energy-based PCA for monitoring batch processes in semiconductor manufacturing
TJ Rato, J Blue, J Pinaton, MS Reis
IEEE Transactions on Automation Science and Engineering 14 (2), 894-904, 2016
352016
Demand planning approaches to aggregating and forecasting interrelated demands for safety stock and backup capacity planning
A Chen, CH Hsu, J Blue
International journal of production Research 45 (10), 2269-2294, 2007
302007
Tool Condition Diagnosis with a Recipe-Independent Hierarchical Monitoring Scheme
J Blue, D Gleispach, A Roussy, P Scheibelhofer
IEEE Transactions on Semiconductor Manufacturing 26 (1), 82-91, 2013
172013
Automatic equipment fault fingerprint extraction for the fault diagnostic on the batch process data
H Rostami, J Blue, C Yugma
Applied Soft Computing 68, 972-989, 2018
152018
Equipment condition diagnosis and fault fingerprint extraction in semiconductor manufacturing
H Rostami, J Blue, C Yugma
2016 15th IEEE International Conference on Machine Learning and Applications …, 2016
152016
Impact of integrating equipment health in production scheduling for semiconductor fabrication
YT Kao, S Dauzère-Pérès, J Blue, SC Chang
Computers & Industrial Engineering 120, 450-459, 2018
122018
Spatial variance spectrum analysis and its application to unsupervised detection of systematic wafer spatial variations
J Blue, A Chen
IEEE transactions on automation science and engineering 8 (1), 56-66, 2010
112010
Efficient FDC based on hierarchical tool condition monitoring scheme
J Blue, A Roussy, A Thieullen, J Pinaton
2012 SEMI Advanced Semiconductor Manufacturing Conference, 359-364, 2012
102012
Opportunity for improving fab effectiveness by predictive overall equipment effectiveness (POEE)
Y Kao, S Chang, S Dauzere-Peres, J Blue
2016 e-Manufacturing and Design Collaboration Symposium (eMDC), 1-4, 2016
82016
Recipe-independent health indicator for tool predictive maintenance and fault diagnosis
A Chen, J Blue
IEEE Transactions on Semiconductor Manufacturing 22 (4), 522-535, 2009
52009
Optimum sampling for track PEB CD integrated metrology
A Chen, S Hsueh, J Blue
2009 IEEE International Conference on Automation Science and Engineering …, 2009
52009
A Structure Data-Driven Framework for Virtual Metrology Modeling
WT Yang, J Blue, A Roussy, J Pinaton, MS Reis
IEEE Transactions on Automation Science and Engineering 17 (3), 1297-1306, 2019
32019
Heterogranular multivariate analytics for detecting and controlling the root causes of the mismatching machines in semiconductor manufacturing
A Chouichi, J Blue, C Yugma, F Pasqualini
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC …, 2018
32018
Equipment anomaly detection and automatic fault fingerprint extraction in semiconductor manufacturing
H Rostami, J Blue, C Yugma
International Symposium on Semiconductor Manufacturing Intelligence, 8-10, 2016
32016
FDC R2R variation monitoring for sensor level diagnosis in tool condition hierarchy
J Blue, A Roussy, J Pinaton
25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014 …, 2014
32014
Chamber-to-chamber discrepancy detection in semiconductor manufacturing
A Chouichi, J Blue, C Yugma, F Pasqualini
IEEE Transactions on Semiconductor Manufacturing 33 (1), 86-95, 2020
22020
Single machine scheduling with consideration of preventive maintenance and machine health
KL Huang, J Blue, HC Weng, SH Liu
MATEC Web of Conferences 192, 01009, 2018
22018
Le système ne peut pas réaliser cette opération maintenant. Veuillez réessayer plus tard.
Articles 1–20