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Benoit Sklénard
Benoit Sklénard
Research scientist, CEA
Adresse e-mail validée de cea.fr
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Advances, challenges and opportunities in 3D CMOS sequential integration
P Batude, M Vinet, B Previtali, C Tabone, C Xu, J Mazurier, O Weber, ...
2011 International Electron Devices Meeting, 7.3. 1-7.3. 4, 2011
3872011
Method of making a 3D integrated circuit
B Sklenard, P Batude
US Patent 9,018,078, 2015
1882015
3DVLSI with CoolCube process: An alternative path to scaling
P Batude, C Fenouillet-Beranger, L Pasini, V Lu, F Deprat, L Brunet, ...
2015 Symposium on VLSI Technology (VLSI Technology), T48-T49, 2015
1512015
Understanding RRAM endurance, retention and window margin trade-off using experimental results and simulations
C Nail, G Molas, P Blaise, G Piccolboni, B Sklenard, C Cagli, M Bernard, ...
2016 IEEE International Electron Devices Meeting (IEDM), 4.5. 1-4.5. 4, 2016
1252016
3D Sequential Integration: Application-driven technological achievements and guidelines
P Batude, L Brunet, C Fenouillet-Beranger, F Andrieu, JP Colinge, ...
2017 IEEE International Electron Devices Meeting (IEDM), 3.1. 1-3.1. 4, 2017
902017
3D sequential integration opportunities and technology optimization
P Batude, B Sklenard, C Fenouillet-Beranger, B Previtali, C Tabone, ...
IEEE International Interconnect Technology Conference, 373-376, 2014
672014
Monolithic 3D integration: A powerful alternative to classical 2D scaling
M Vinet, P Batude, C Fenouillet-Beranger, F Clermidy, L Brunet, ...
2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S …, 2014
632014
Linear hyperfine tuning of donor spins in silicon using hydrostatic strain
J Mansir, P Conti, Z Zeng, JJ Pla, P Bertet, MW Swift, CG Van de Walle, ...
Physical Review Letters 120 (16), 167701, 2018
492018
Endurance/retention trade off in HfOx and TaOx based RRAM
M Azzaz, E Vianello, B Sklenard, P Blaise, A Roule, C Sabbione, ...
2016 IEEE 8th international memory workshop (IMW), 1-4, 2016
482016
Hybrid‐RRAM toward next generation of nonvolatile memory: coupling of oxygen vacancies and metal ions
G Sassine, C Nail, P Blaise, B Sklenard, M Bernard, R Gassilloud, A Marty, ...
Advanced Electronic Materials 5 (2), 1800658, 2019
432019
HfO2/Ti Interface Mediated Conductive Filament Formation in RRAM: An Ab Initio Study
B Traore, P Blaise, B Sklénard, E Vianello, B Magyari-Köpe, Y Nishi
IEEE Transactions on Electron Devices 65 (2), 507-513, 2018
322018
Reduction of Monoclinic HfO2: A Cascading Migration of Oxygen and Its Interplay with a High Electric Field
B Traoré, P Blaise, B Sklénard
The Journal of Physical Chemistry C 120 (43), 25023-25029, 2016
302016
Understanding Si (111) solid phase epitaxial regrowth using Monte Carlo modeling: Bi-modal growth, defect formation, and interface topology
I Martin-Bragado, B Sklenard
Journal of Applied Physics 112 (2), 2012
292012
High performance low temperature activated devices and optimization guidelines for 3D VLSI integration of FD, TriGate, FinFET on insulator
L Pasini, P Batude, M Cassé, B Mathieu, B Sklenard, FP Luce, S Reboh, ...
2015 Symposium on VLSI Technology (VLSI Technology), T50-T51, 2015
232015
High performance CMOS FDSOI devices activated at low temperature
L Pasini, P Batude, J Lacord, M Casse, B Mathieu, B Sklenard, FP Luce, ...
2016 IEEE Symposium on VLSI Technology, 1-2, 2016
212016
Low temperature FDSOI devices, a key enabling technology for 3D sequential integration
P Batude, B Sklenard, C Xu, B Previtali, B De Salvo, M Vinet
2013 International Symposium on VLSI Technology, Systems and Application …, 2013
192013
An atomistic investigation of the impact of in-plane uniaxial stress during solid phase epitaxial regrowth
B Sklenard, JC Barbe, P Batude, P Rivallin, C Tavernier, S Cristoloveanu, ...
Applied Physics Letters 102 (15), 2013
182013
A review of low temperature process modules leading up to the first (≤ 500° C) planar FDSOI CMOS devices for 3-D sequential integration
C Fenouillet-Beranger, L Brunet, P Batude, L Brevard, X Garros, M Casse, ...
IEEE Transactions on Electron Devices 68 (7), 3142-3148, 2021
172021
Optical vs electronic gap of hafnia by ab initio Bethe-Salpeter equation
B Sklénard, A Dragoni, F Triozon, V Olevano
Applied Physics Letters 113 (17), 2018
162018
First demonstration of low temperature (≤ 500° C) CMOS devices featuring functional RO and SRAM bitcells toward 3D VLSI integration
C Fenouillet-Beranger, L Brunet, P Batude, L Brevard, X Garros, ...
2020 IEEE Symposium on VLSI Technology, 1-2, 2020
152020
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