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Lin Lee Cheong
Lin Lee Cheong
Amazon AWS
Adresse e-mail validée de amazon.com
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Thermal probe maskless lithography for 27.5 nm half-pitch Si technology
LL Cheong, P Paul, F Holzner, M Despont, DJ Coady, JL Hedrick, R Allen, ...
Nano letters 13 (9), 4485-4491, 2013
962013
Neon ion beam lithography (NIBL)
D Winston, VR Manfrinato, SM Nicaise, LL Cheong, H Duan, D Ferranti, ...
Nano letters 11 (10), 4343-4347, 2011
902011
Sub-5 keV electron-beam lithography in hydrogen silsesquioxane resist
VR Manfrinato, LL Cheong, H Duan, D Winston, HI Smith, KK Berggren
Microelectronic Engineering 88 (10), 3070-3074, 2011
382011
Three-dimensional photonic crystals by large-area membrane stacking
L Lu, LL Cheong, HI Smith, SG Johnson, JD Joannopoulos, M Soljačić
Optics letters 37 (22), 4726-4728, 2012
242012
Identification of hot spots or defects by machine learning
J Su, Y Zou, C Lin, S Hunsche, M Jochemsen, YW Lu, LL Cheong
US Patent 11,443,083, 2022
212022
Thermal probe nanolithography: in-situ inspection, high-speed, high-resolution, 3D
F Holzner, P Paul, M Despont, LL Cheong, J Hedrick, U Dürig, A Knoll
29th European Mask and Lithography Conference 8886, 26-34, 2013
192013
EUV processing and characterization for BEOL
N Saulnier, Y Xu, W Wang, L Sun, LL Cheong, R Lallement, G Beique, ...
Extreme Ultraviolet (EUV) Lithography VI 9422, 234-245, 2015
182015
Failure detection and classsification using sensor data and/or measurement data
T Honda, LL Cheong, L Kuravi
US Patent 11,029,359, 2021
112021
3D nanostructures by stacking pre-patterned fluid-supported single-crystal Si membranes
S Ghadarghadr, CP Fucetola, L Lee Cheong, E E Moon, H I Smith
Journal of Vacuum Science & Technology B 29 (6), 2011
102011
Single view physical distance estimation using human pose
X Fei, H Wang, LL Cheong, X Zeng, M Wang, J Tighe
Proceedings of the IEEE/CVF International Conference on Computer Vision …, 2021
72021
Membrane-integrated superconducting nanowire singlephoton detectors
F Najafi, J Mower, X Hu, F Bellei, P Kharel, A Dane, Y Ivry, L Cheong, ...
CLEO: 2013, 1-2, 2013
72013
EUV mask cleans comparison of frontside and dual-sided concurrent cleaning
LL Cheong, LM Kindt, C Turley, D Leonhard, JM Boyle, CF Robinson, ...
Extreme Ultraviolet (EUV) Lithography VI 9422, 521-530, 2015
52015
Closed-loop high-speed 3D thermal probe nanolithography
AW Knoll, M Zientek, LL Cheong, C Rawlings, P Paul, F Holzner, ...
Alternative Lithographic Technologies VI 9049, 47-54, 2014
52014
Maintenance scheduling for semiconductor manufacturing equipment
T Honda, JD David, LL Cheong
US Patent 11,295,993, 2022
42022
Selective inclusion/exclusion of semiconductor chips in accelerated failure tests
LL Cheong, T Honda, RD Kekatpure, L Kuravi, JD David
US Patent 10,777,470, 2020
42020
Exploring EUV mask backside defectivity and control methods
C Turley, J Rankin, L Kindt, M Lawliss, L Bolton, K Collins, L Cheong, ...
Photomask Japan 2015: Photomask and Next-Generation Lithography Mask …, 2015
42015
Methods for determining an approximate value of a processing parameter at which a characteristic of the patterning process has a target value
LL Cheong, W Huang, B La Fontaine
US Patent 11,126,092, 2021
32021
Prediction of defensive player trajectories in NFL games with defender CNN-LSTM Model
LL Cheong, X Zeng, A Tyagi
32021
Reduction of Critical Dimension Difference in Litho-Etch-Litho-Etch Double Patterning Process
H Tang, JC Shearer, LL Cheong, NA Saulnier, SA Sieg, K Petrillo, A Metz, ...
Journal of Photopolymer Science and Technology 28 (1), 13-16, 2015
22015
Secondary-electron signal level measurements of self-assembled monolayers for spatial-phase-locked electron-beam lithography
L Lee Cheong, JM Lobez, EE Moon, JT Hastings, HI Smith
Journal of Vacuum Science & Technology B 29 (6), 2011
22011
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