Ion Implantation of Graphene Toward IC Compatible Technologies U Bangert, W Pierce, DM Kepaptsoglou, Q Ramasse, R Zan, MH Gass, ...
Nano letters 13 (10), 4902-4907, 2013
207 2013 Charge storage and interface states effects in Si-nanocrystal memory obtained using low-energy implantation and annealing E Kapetanakis, P Normand, D Tsoukalas, K Beltsios, J Stoemenos, ...
Applied Physics Letters 77 (21), 3450-3452, 2000
190 2000 Composition and structure of the native Si oxide by high depth resolution medium energy ion scatering AH Al-Bayati, KG Orrman-Rossiter, JA Van Den Berg, DG Armour
Surface science 241 (1-2), 91-102, 1991
102 1991 An investigation of the kinetics of structural changes during the early oxidation stages of a Ni (100) surface using low energy ion scattering (LEIS) JA Van den Berg, LK Verheij, DG Armour
Surface Science 91 (1), 218-236, 1980
74 1980 Doping of few-layered graphene and carbon nanotubes using ion implantation U Bangert, A Bleloch, MH Gass, A Seepujak, J Van den Berg
Physical Review B 81 (24), 245423, 2010
71 2010 Depth profile characterization of ultra shallow junction implants P Hönicke, B Beckhoff, M Kolbe, D Giubertoni, J van den Berg, G Pepponi
Analytical and bioanalytical chemistry 396, 2825-2832, 2010
71 2010 Characterization by medium energy ion scattering of damage and dopant profiles produced by ultrashallow B and As implants into Si at different temperatures JA Van den Berg, DG Armour, S Zhang, S Whelan, H Ohno, TS Wang, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2002
69 2002 Nanocrystals manufacturing by ultra-low-energy ion-beam-synthesis for non-volatile memory applications P Normand, E Kapetanakis, P Dimitrakis, D Skarlatos, K Beltsios, ...
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2004
68 2004 MIAMI: Microscope and ion accelerator for materials investigations JA Hinks, JA Van Den Berg, SE Donnelly
Journal of Vacuum Science & Technology A 29 (2), 2011
66 2011 Structure analysis of an oxidized nickel (110) surface using low energy ion scattering LK Verheij, JA Van den Berg, DG Armour
Surface Science 84 (2), 408-426, 1979
60 1979 Formation of 2‐D Arrays of Silicon Nanocrystals in Thin SiO2 Films by Very‐Low Energy Si+ Ion Implantation P Normand, D Tsoukalas, E Kapetanakis, JA Van Den Berg, DG Armour, ...
Electrochemical and solid-state letters 1 (2), 88, 1998
57 1998 Atomic layer deposition of ruthenium thin films from (ethylbenzyl)(1-ethyl-1, 4-cyclohexadienyl) Ru: Process characteristics, surface chemistry, and film properties M Popovici, B Groven, K Marcoen¶, QM Phung, S Dutta, J Swerts, ...
Chemistry of Materials 29 (11), 4654-4666, 2017
52 2017 A comparison of atom and ion induced SSIMS—Evidence for a charge induced damage effect in insulator materials A Brown, JA van den Berg, JC Vickerman
Spectrochimica Acta Part B: Atomic Spectroscopy 40 (5-6), 871-877, 1985
51 1985 Theoretical and experimental studies of the broadening of dilute delta‐doped Si spikes in GaAs during SIMS depth profiling R Badheka, M Wadsworth, DG Armour, JA Van den Berg, JB Clegg
Surface and interface analysis 15 (9), 550-558, 1990
49 1990 Si ultrashallow p + n junctions using low‐energy boron implantation A Bousetta, JA Van den Berg, DG Armour, PC Zalm
Applied physics letters 58 (15), 1626-1628, 1991
47 1991 Formation of 2-D arrays of semiconductor nanocrystals or semiconductor-rich nanolayers by very low-energy Si or Ge ion implantation in silicon oxide films P Normand, K Beltsios, E Kapetanakis, D Tsoukalas, T Travlos, ...
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2001
42 2001 On the production and annealing of bombardment induced surface damage on a nickel (110) surface LK Verheij, JA Van den Berg, DG Armour
Surface Science 122 (2), 216-234, 1982
42 1982 Ion beam deposited epitaxial thin silicon films KG Orrman-Rossiter, AH Al-Bayati, DG Armour, SE Donnelly, ...
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 1991
41 1991 Low energy ion scattering (LEIS) and the compositional and structural analysis of solid surfaces. Part I JA Van den Berg, DG Armour
Vacuum 31 (6), 259-270, 1981
40 1981 Evidence of a charge induced contribution to the sputtering yield of insulating and semiconducting materials AJ Eccles, JA Van den Berg, A Brown, JC Vickerman
Applied physics letters 49 (4), 188-190, 1986
38 1986