| Sputter deposition of stress controlled piezoelectric AlN and AlScN films for ultrasonic and energy harvesting applications S Barth, H Bartzsch, D Gloess, P Frach, T Herzog, S Walter, H Heuer Ultrasonics Symposium (IUS), 2013 IEEE International, 1351-1353, 2013 | 46 | 2013 |
| Test head for testing a workpiece having an ultrasonic transducer configuration containing a plurality of ultrasonic transducers and process for producing such a test head G Engl, M Kroening, H Heuer, T Herzog US Patent 9,423,382, 2016 | 13 | 2016 |
| Properties of piezoelectric AlN layers deposited by reactive pulse magnetron sputtering H Bartzsch, M Gittner, D Glöß, P Frach, T Herzog, S Walter, H Heuer Society of Vacuum Coaters (Annual Technical Conference) <54, 2011, Chicago …, 2011 | 11 | 2011 |
| Comparison of ultrasonic phased array probes based on PMN-PT and PZT 1-3 composites S Walter, T Herzog, F Schubert, H Heuer 19th WCNDT 2016 World Conference on non-Destructive Testing, 13-17 June, Germany, 2016 | 7 | 2016 |
| Aluminum Nitride Thin Films for High Frequency Smart Ultrasonic Sensor Systems T HERZOG, S WALTER, S HILLMANN, H HEUER 18th World Conference on Nondestructive Testing, 16-20 April 2012, Durban …, 2012 | 7 | 2012 |
| Design and fabrication of a 5 MHz ultrasonic phased array probe with curved transducer J Fischer, T Herzog, S Walter, H Heuer Smart Sensors, Actuators, and MEMS VI 8763, 685-690, 2013 | 6 | 2013 |
| Smart ultrasonic sensors systems: potential of aluminum nitride thin films for the excitation of the ultrasound at high frequencies S Walter, T Herzog, H Heuer, H Bartzsch, D Gloess Microsystem technologies 18, 1193-1199, 2012 | 6 | 2012 |
| Investigations on aluminum nitride thin film properties and design considerations for smart high frequency ultrasound sensors S Walter, T Herzog, H Heuer, ID Branch The Second International Conference on Smart Sensor, Actuators and MEMS …, 2011 | 6 | 2011 |
| High-Performance Ultrasonic Transducers based on PMN-PT Single Crystals Fabricated in 1-3 Piezo-Composite Technology T Herzog, S Walter, SG Lee, JH Lee, F Schubert, H Heuer International Congress on Ultrasonics; Bruges, Belgium, 3-9 Sept 2019, 2019 | 3 | 2019 |
| Investigations of PMN-PT composites for high sensitive ultrasonic phased array probes in NDE S Walter, T Herzog, F Schubert, H Heuer, TY Han, SG Lee, HM Chae, ... 2015 IEEE SENSORS, 1-4, 2015 | 3 | 2015 |
| Effect of process parameters on structure and piezoelectric properties of AlN and AlXSc1−XN films deposited by pulsed magnetron sputtering S Barth, H Bartzsch, D Glöß, P Frach, O Zywitzki, T Herzog, S Walter, ... 2014 IEEE International Ultrasonics Symposium, 769-772, 2014 | 2 | 2014 |
| Ultrasonic dual element probes revisited–complex wave phenomena as a basis for transducer design and optimization F Schubert, T Herzog, S Walter, H Heuer Proceedings of Meetings on Acoustics 38 (1), 2019 | 1 | 2019 |
| Ultrasonic sensor for detecting and/or scanning objects T Herzog, H Heuer US Patent 8,468,892, 2013 | 1 | 2013 |
| Optimization of electrode size for aluminum-nitride matrix ultrasonic transducers in the frequency range above 200 MHz Y Wei, T Herzog, H Heuer Ultrasonics 53 (3), 739-744, 2013 | 1 | 2013 |
| Optimization of electrode size for aluminum-nitride matrix ultrasonic transducers in the frequency range above 200 MHz Y Wei, T Herzog, H Heuer Ultrasonics 53 (3), 739-744, 2013 | 1 | 2013 |
| Performance Improvement of High Frequency Aluminum Nitride Ultrasonic Transducers JY Wei, T Herzog, H Heuer Sensors & Transducers, Vol. 18, Special Issue 18 (SPEC. ISS. 1), pp. 66-75, 2013 | 1 | 2013 |
| Smart ultrasonic sensors systems: Investigations on aluminum nitride thin films for the excitation of high frequency ultrasound S Walter, T Herzog, H Heuer, H Bartzsch, D Gloess Smart Sensors, Actuators, and MEMS V 8066, 63-70, 2011 | 1 | 2011 |
| High-Performance Ultrasonic Transducers based on PMN-PT Single Crystals for NDT of aerospace materials T Herzog, S Walter, SG Lee, JH Lee, F Schubert, R Dittrich, H Heuer 11th Symposium on NDT in Aerospace – PARIS-SACLAY – Nov 13 to 15, 2019, 2019 | | 2019 |
| ENTWICKLUNG EINES ULTRASCHALL-PRÜFSYSTEMS FÜR ZUGFESTE PRESSVERBINDER AN FAHRDRAHTLEITUNGEN T Herzog, S Walter, H Heuer, J Michauk, S Heilmann DACH-Jahrestagung 2019, Friedrichshafen 27.5. bis 29.5.2019, 2019 | | 2019 |
| NEW HIGH-PERFORMANCE ULTRASONIC TRANSDUCERS BASED ON PMN-PT SINGLE CRYSTALS FOR NDT IN THE AUTOMOTIVE INDUSTRY T Herzog, F Schubert, H Heuer, SG Lee, M Kwon INTERNATIONAL SYMPOSIUM ON PIEZOCOMPOSITE APPLICATIONS ISPA, SEPTEMBER 13 …, 2017 | | 2017 |
Henning HeuerProf. Dr.-Ing., TU Dresden, Fraunhofer IKTS DresdenAdresse e-mail validée de ikts.fraunhofer.de
