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Suresh Sampath
Suresh Sampath
Michigan Technological University
Adresse e-mail validée de imtmems.com
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Are diamonds a MEMS'best friend?
O Auciello, S Pacheco, AV Sumant, C Gudeman, S Sampath, A Datta, ...
IEEE Microwave Magazine 8 (6), 61-75, 2007
1072007
Robustness of RF MEMS capacitive switches with molybdenum membranes
C Palego, J Deng, Z Peng, S Halder, JCM Hwang, DI Forehand, ...
IEEE Transactions on Microwave Theory and Techniques 57 (12), 3262-3269, 2009
662009
Performance of molybdenum as a mechanical membrane for RF MEMS switches
C Goldsmith, D Forehand, D Scarbrough, I Johnston, S Sampath, A Datta, ...
2009 IEEE MTT-S International Microwave Symposium Digest, 1229-1232, 2009
302009
Charging characteristics of ultra-nano-crystalline diamond in RF MEMS capacitive switches
C Goldsmith, A Sumant, O Auciello, J Carlisle, H Zeng, JCM Hwang, ...
2010 IEEE MTT-S International Microwave Symposium, 1246-1249, 2010
272010
Rapid MEMS prototyping using SU-8, wafer bonding and deep reactive ion etching
SK Sampath, LS Clair, X Wu, DV Ivanov, Q Wang, C Ghosh, KR Farmer
Proceedings of the Fourteenth Biennial University/Government/Industry …, 2001
232001
RF-MEMS capacitive switches with high reliability
CL Goldsmith, OH Auciello, JA Carlisle, S Sampath, AV Sumant, ...
US Patent 8,525,185, 2013
132013
Fundamentals and technology for monolithically integrated RF MEMS switches with ultra-nanocrystalline diamond dielectric/CMOS devices
O Auciello, AV Sumant, C Goldsmith, S O'Brien, S Sampath, C Gudeman, ...
Micro-and Nanotechnology Sensors, Systems, and Applications II 7679, 429-437, 2010
82010
RF-MEMS capacitive switches with high reliability
CL Goldsmith, OH Auciello, JA Carlisle, S Sampath, AV Sumant, ...
UChicago Argonne, LLC, Argonne, IL (United States), 2013
62013
H. c. Yuan, JA Carlisle, B. Kabius, J. Hiller, S. Srinivasan
O Auciello, S Pacheco, AV Sumant, C Gudeman, S Sampath, A Datta, ...
IEEE Microw. Mag 8, 61, 2007
62007
Electrostatic MEMS devices with high reliability
CL Goldsmith, OH Auciello, AV Sumant, DC Mancini, C Gudeman, ...
US Patent 8,963,659, 2015
32015
Contact material for MEMS devices
S Sampath, CS Gudeman
US Patent 10,388,468, 2019
12019
Method for forming a microfabricated structure
SK Sampath
US Patent 9,302,905, 2016
12016
Electrostatic MEMS devices with high reliability
CL Goldsmith, OH Auciello, AV Sumant, DC Mancini, C Gudeman, ...
Univ. of Wisconsin, Madison, WI (United States), 2015
2015
IEEE Microwave Theory and Techniques Society
NS Barker, C Goldsmith, J Maciel, J McKillop, O Auciello, S Pacheco, ...
2007
金刚石是不是微机电系统最好的朋友?
O Suciello, S Pacheco, AV Sumant, C Gudeman, S Sampath, A Dratta, ...
IEEE microwave magazine, 62, 2007
2007
Browse by Author
R Safian, M Saglam, R Saini, T Saito, F Sakai, K Sakurai, ...
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