Are diamonds a MEMS'best friend? O Auciello, S Pacheco, AV Sumant, C Gudeman, S Sampath, A Datta, ... IEEE Microwave Magazine 8 (6), 61-75, 2007 | 107 | 2007 |
Robustness of RF MEMS capacitive switches with molybdenum membranes C Palego, J Deng, Z Peng, S Halder, JCM Hwang, DI Forehand, ... IEEE Transactions on Microwave Theory and Techniques 57 (12), 3262-3269, 2009 | 66 | 2009 |
Performance of molybdenum as a mechanical membrane for RF MEMS switches C Goldsmith, D Forehand, D Scarbrough, I Johnston, S Sampath, A Datta, ... 2009 IEEE MTT-S International Microwave Symposium Digest, 1229-1232, 2009 | 30 | 2009 |
Charging characteristics of ultra-nano-crystalline diamond in RF MEMS capacitive switches C Goldsmith, A Sumant, O Auciello, J Carlisle, H Zeng, JCM Hwang, ... 2010 IEEE MTT-S International Microwave Symposium, 1246-1249, 2010 | 27 | 2010 |
Rapid MEMS prototyping using SU-8, wafer bonding and deep reactive ion etching SK Sampath, LS Clair, X Wu, DV Ivanov, Q Wang, C Ghosh, KR Farmer Proceedings of the Fourteenth Biennial University/Government/Industry …, 2001 | 23 | 2001 |
RF-MEMS capacitive switches with high reliability CL Goldsmith, OH Auciello, JA Carlisle, S Sampath, AV Sumant, ... US Patent 8,525,185, 2013 | 13 | 2013 |
Fundamentals and technology for monolithically integrated RF MEMS switches with ultra-nanocrystalline diamond dielectric/CMOS devices O Auciello, AV Sumant, C Goldsmith, S O'Brien, S Sampath, C Gudeman, ... Micro-and Nanotechnology Sensors, Systems, and Applications II 7679, 429-437, 2010 | 8 | 2010 |
RF-MEMS capacitive switches with high reliability CL Goldsmith, OH Auciello, JA Carlisle, S Sampath, AV Sumant, ... UChicago Argonne, LLC, Argonne, IL (United States), 2013 | 6 | 2013 |
H. c. Yuan, JA Carlisle, B. Kabius, J. Hiller, S. Srinivasan O Auciello, S Pacheco, AV Sumant, C Gudeman, S Sampath, A Datta, ... IEEE Microw. Mag 8, 61, 2007 | 6 | 2007 |
Electrostatic MEMS devices with high reliability CL Goldsmith, OH Auciello, AV Sumant, DC Mancini, C Gudeman, ... US Patent 8,963,659, 2015 | 3 | 2015 |
Contact material for MEMS devices S Sampath, CS Gudeman US Patent 10,388,468, 2019 | 1 | 2019 |
Method for forming a microfabricated structure SK Sampath US Patent 9,302,905, 2016 | 1 | 2016 |
Electrostatic MEMS devices with high reliability CL Goldsmith, OH Auciello, AV Sumant, DC Mancini, C Gudeman, ... Univ. of Wisconsin, Madison, WI (United States), 2015 | | 2015 |
IEEE Microwave Theory and Techniques Society NS Barker, C Goldsmith, J Maciel, J McKillop, O Auciello, S Pacheco, ... | | 2007 |
金刚石是不是微机电系统最好的朋友? O Suciello, S Pacheco, AV Sumant, C Gudeman, S Sampath, A Dratta, ... IEEE microwave magazine, 62, 2007 | | 2007 |
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