| Etching of SiC in low power inductively-coupled plasma AA Osipov, SE Aleksandrov, YV Solov’ev, AA Uvarov, AA Osipov Russian Microelectronics 47, 427-433, 2018 | 21 | 2018 |
| Spatial distribution of the electrical potential and ion concentration in the downstream area of atmospheric pressure remote plasma MV Mishin, VS Protopopova, AA Uvarov, SE Alexandrov AIP Advances 4 (10), 2014 | 13 | 2014 |
| Evolution of the microstructure in titanium dioxide films during chemical vapor deposition M Baryshnikova, L Filatov, M Mishin, A Uvarov, A Kondrateva, ... physica status solidi (a) 212 (7), 1533-1538, 2015 | 12 | 2015 |
| Nanodiamond composite as a material for cold electron emitters AV Arkhipov, SK Gordeev, SB Korchagina, GG Sominski, AA Uvarov Journal of Physics: Conference Series 100 (7), 072047, 2008 | 10 | 2008 |
| A computational view on vapour phase coagulation of nanoparticles synthesized by atmospheric pressure PECVD MV Mishin, KY Zamotin, VS Protopopova, AA Uvarov, LA Filatov, ... physica status solidi (c) 12 (7), 891-903, 2015 | 5 | 2015 |
| Химическое осаждение из газовой фазы диэлектрических пленок политетрафторэтилена АА Уваров, СЕ Александров Научно-технические ведомости СПбГПУ 3, 141-145, 2011 | 4 | 2011 |
| Molecular Properties Characterization of PTFE Films Deposited by Hot Wire CVD A Uvarov, K Uemura, S Alexandrov, H Murayama, R Soba 10th International Conference on Modification of Materials with Particle …, 2010 | 4 | 2010 |
| Correlations in field electron emission current from local spots at nano-porous carbon films AV Arkhipov, SI Krel, MV Mishin, AA Uvarov St. Petersburg State Polytechnical University Journal. Physics and Mathematics 4, 2013 | 3 | 2013 |
| Specific features of chemical deposition of polytetrafluoroethylene films from hexafluoropropylene oxide AA Uvarov, SE Alexandrov Russian Journal of General Chemistry 83 (8), 1607-1612, 2013 | 2 | 2013 |
| Dynamics and interaction of active centers at nanocarbon electron emitters AV Arkhipov, MV Mishin, GG Sominski, BA Kriegel, IV Parygin, AA Uvarov 2006 19th International Vacuum Nanoelectronics Conference, 221-222, 2006 | 2 | 2006 |
| Методика исследования флуктуаций тока полевой эмиссии электронов с наноуглеродной пленки АВ Архипов, МВ Мишин, ГГ Соминский, БА Кригель, ИВ Парыгин, ... Труды СПбГТУ 500, 108-122, 2006 | 2 | 2006 |
| P‐51: Investigation on ICP‐CVD as a Polyvalent Low Cost Technology Dedicated to Low Temperature μ‐Si TFT Prototyping. O de Sagazan, A Uvarov, E Bestelink, RA Sporea, E Jacques SID Symposium Digest of Technical Papers 51 (1), 1538-1541, 2020 | 1 | 2020 |
| Разработка технологии получения нанодисперсных порошков в плазме высокочастотного атмосферного разряда при атмосферном давлении СЕ Александров, МВ Мишин, АА Уваров, ИВ Чиркова Научно-технические ведомости СПбГПУ 54, 116-121, 2008 | 1 | 2008 |
| Emission properties of a nanodiamond composite AV Arkhipov, SK Gordeev, SB Korchagina, GG Sominski, AA Uvarov 8th Biennial International Workshop “Fullerenes and Atomic Clusters” IWFAC …, 2007 | 1 | 2007 |
| Performance of nanocarbon field emitters in electron device relevant conditions AV Arkhipov, MV Mishin, GG Sominski, AA Uvarov 8th Biennial International Workshop “Fullerenes and Atomic Clusters” IWFAC …, 2007 | 1 | 2007 |
| Time- and Area- Resolved Investigation of Field-Induced Electron Emission from Nanocarbon Films AV Arkhipov, MV Mishin, GG Sominski, BA Kriegel, IV Parygin, AA Uvarov Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International …, 2006 | 1 | 2006 |
| Mechanism of field electron emission from heterogeneous nano-carbon films AV Arkhipov, MV Mishin, GG Sominski, IV Paryguin, AA Uvarov 7th Biennial International Workshop “Fullerenes and Atomic Clusters” IWFAC …, 2005 | 1* | 2005 |
| Legal Responsibility in Civil Society AA Uvarov Russian Journal of Legal Studies (Moscow) 5 (1), 73-80, 2018 | | 2018 |
| About particular purpose (aspects) regulation influence of standard legal acts AA Uvarov Russian Journal of Legal Studies (Moscow) 2 (3), 52-59, 2015 | | 2015 |
| Технологическая установка плазмохимического травления полупроводниковых материалов с источником индуктивно-связанной плазмы АА Уваров, СЕ Александров, ГА Янкевич Вакуумная техника и технология 23 (1), 162-163, 2014 | | 2014 |
Protopopova VeraSaint Petersburg State Polytechnical University, Aalto UniversityVerified email at aalto.fi
