MEMS resonators for frequency reference and timing applications G Wu, J Xu, EJ Ng, W Chen
Journal of Microelectromechanical Systems 29 (5), 1137-1166, 2020
87 2020 Low-cost, tiny-sized MEMS hydrophone sensor for water pipeline leak detection J Xu, KTC Chai, G Wu, B Han, ELC Wai, W Li, J Yeo, E Nijhof, Y Gu
IEEE Transactions on Industrial Electronics 66 (8), 6374-6382, 2018
78 2018 Wafer-level vacuum packaging for MEMS resonators using glass frit bonding G Wu, D Xu, B Xiong, Y Wang, Y Wang, Y Ma
Journal of microelectromechanical systems 21 (6), 1484-1491, 2012
62 2012 GHz spurious mode free AlN lamb wave resonator with high figure of merit using one dimensional phononic crystal tethers G Wu, Y Zhu, S Merugu, N Wang, C Sun, Y Gu
Applied Physics Letters 109 (1), 2016
48 2016 Phononic crystal strip based anchors for reducing anchor loss of micromechanical resonators D Feng, D Xu, G Wu, B Xiong, Y Wang
Journal of Applied Physics 115 (2), 2014
43 2014 Isotropic Silicon Etching With D Xu, B Xiong, G Wu, Y Wang, X Sun, Y Wang
Journal of microelectromechanical systems 21 (6), 1436-1444, 2012
38 2012 Wafer-level vacuum-packaged high-performance AlN-on-SOI piezoelectric resonator for Sub-100-MHz oscillator applications G Wu, J Xu, X Zhang, N Wang, D Yan, JLK Lim, Y Zhu, W Li, Y Gu
IEEE Transactions on Industrial Electronics 65 (4), 3576-3584, 2017
37 2017 A high-performance bulk mode single crystal silicon microresonator based on a cavity-SOI wafer G Wu, D Xu, B Xiong, Y Wang
Journal of Micromechanics and Microengineering 22 (2), 025020, 2012
34 2012 A dual-mass fully decoupled MEMS gyroscope with wide bandwidth and high linearity GQ Wu, GL Chua, YD Gu
Sensors and Actuators A: Physical 259, 50-56, 2017
30 2017 Resonant magnetic field sensor with capacitive driving and electromagnetic induction sensing G Wu, D Xu, B Xiong, D Feng, Y Wang
IEEE electron device letters 34 (3), 459-461, 2013
30 2013 A wide measurement pressure range CMOS-MEMS based integrated thermopile vacuum gauge with an XeF2 dry-etching process X Sun, D Xu, B Xiong, G Wu, Y Wang
Sensors and Actuators A: Physical 201, 428-433, 2013
29 2013 Design and characterization of an aluminum nitride-based MEMS hydrophone with biologically honeycomb architecture L Jia, L Shi, C Liu, Y Yao, C Sun, G Wu
IEEE Transactions on Electron Devices 68 (9), 4656-4663, 2021
28 2021 A temperature-stable and low impedance piezoelectric MEMS resonator for drop-in replacement of quartz crystals W Chen, W Jia, Y Xiao, Z Feng, G Wu
IEEE Electron Device Letters 42 (9), 1382-1385, 2021
23 2021 Development of six-degree-of-freedom inertial sensors with an 8-in advanced MEMS fabrication platform G Wu, B Han, DD Cheam, LC Wai, PHK Chang, N Singh, Y Gu
IEEE Transactions on Industrial Electronics 66 (5), 3835-3842, 2018
23 2018 Considerations for an 8-inch wafer-level CMOS compatible AlN pyroelectric 5–14 μm wavelength IR detector towards miniature integrated photonics gas sensors DKT Ng, G Wu, TT Zhang, L Xu, J Sun, WW Chung, H Cai, Q Zhang, ...
Journal of Microelectromechanical systems 29 (5), 1199-1207, 2020
22 2020 Uncooled thermoelectric infrared sensor with advanced micromachining D Xu, B Xiong, G Wu, Y Ma, Y Wang
IEEE Sensors Journal 12 (6), 2014-2023, 2012
22 2012 A novel trapezoidal ScAlN/AlN-based MEMS piezoelectric accelerometer B Hu, Y Liu, B Lin, G Wu, W Liu, C Sun
IEEE Sensors Journal 21 (19), 21277-21284, 2021
21 2021 Design and performance of scAlN/AlN trapezoidal cantilever-based MEMS piezoelectric energy harvesters Y Liu, B Hu, Y Cai, J Zhou, W Liu, A Tovstopyat, G Wu, C Sun
IEEE Transactions on Electron Devices 68 (6), 2971-2976, 2021
20 2021 Extending of band gaps in silicon based one-dimensional phononic crystal strips D Feng, D Xu, G Wu, B Xiong, Y Wang
Applied Physics Letters 103 (15), 2013
17 2013 Wafer-level vacuum packaging for microsystems using glass frit bonding G Wu, D Xu, X Sun, B Xiong, Y Wang
IEEE Transactions on Components, Packaging and Manufacturing Technology 3 …, 2013
17 2013 
Chengliang SunInstitute of Microelectronics, A*Star, SingaporeAdresse e-mail validée de ime.a-star.edu.sg
