P.M. (Lina) Sarro
P.M. (Lina) Sarro
Delft University of Technology, DIMES, The Netherlands
Adresse e-mail validée de tudelft.nl
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Silicon carbide as a new MEMS technology
PM Sarro
Sensors and Actuators A: Physical 82 (1-3), 210-218, 2000
5022000
Thermal sensors based on the Seebeck effect
AW Van Herwaarden, PM Sarro
Sensors and Actuators 10 (3-4), 321-346, 1986
4581986
Atomic-scale electron microscopy at ambient pressure
JF Creemer, S Helveg, GH Hoveling, S Ullmann, AM Molenbroek, ...
Ultramicroscopy 108 (9), 993-998, 2008
3352008
Surface micromachined tuneable interferometer array
K Aratani, PJ French, PM Sarro, D Poenar, RF Wolffenbuttel, ...
Sensors and Actuators A: Physical 43 (1-3), 17-23, 1994
2951994
Flexible mirror micromachined in silicon
G Vdovin, PM Sarro
Applied optics 34 (16), 2968-2972, 1995
2751995
Optimization of a low-stress silicon nitride process for surface-micromachining applications
PJ French, PM Sarro, R Mallée, EJM Fakkeldij, RF Wolffenbuttel
Sensors and Actuators A: physical 58 (2), 149-157, 1997
2061997
Silicon three-axial tactile sensor
Z Chu, PM Sarro, S Middelhoek
Sensors and Actuators A: Physical 54 (1-3), 505-510, 1996
2001996
Low temperature surface passivation for silicon solar cells
C Leguijt, P Lölgen, JA Eikelboom, AW Weeber, FM Schuurmans, ...
Solar Energy Materials and Solar Cells 40 (4), 297-345, 1996
1701996
Technology and applications of micromachined silicon adaptive mirrors
GV Vdovin, S Middelhoek, PM Sarro
Optical engineering 36 (5), 1382-1390, 1997
1691997
Integrated thermopile sensors
AW Van Herwaarden, DC Van Duyn, BW Van Oudheusden, PM Sarro
Sensors and Actuators A: Physical 22 (1-3), 621-630, 1990
1561990
Through-wafer copper electroplating for three-dimensional interconnects
NT Nguyen, E Boellaard, NP Pham, VG Kutchoukov, G Craciun, PM Sarro
Journal of micromechanics and microengineering 12 (4), 395, 2002
1512002
Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications
EJ Connolly, GM O’Halloran, HTM Pham, PM Sarro, PJ French
Sensors and Actuators A: Physical 99 (1-2), 25-30, 2002
1462002
Glass-to-glass anodic bonding with standard IC technology thin films as intermediate layers
A Berthold, L Nicola, PM Sarro, MJ Vellekoop
Sensors and Actuators A: Physical 82 (1-3), 224-228, 2000
1442000
Capillary electrophoresis with on‐chip four‐electrode capacitively coupled conductivity detection for application in bioanalysis
RM Guijt, E Baltussen, G van der Steen, H Frank, H Billiet, ...
Electrophoresis 22 (12), 2537-2541, 2001
1372001
Spray coating of photoresist for pattern transfer on high topography surfaces
NP Pham, JN Burghartz, PM Sarro
Journal of Micromechanics and Microengineering 15 (4), 691, 2005
1352005
On-chip contactless four-electrode conductivity detection for capillary electrophoresis devices
F Laugere, RM Guijt, J Bastemeijer, G van der Steen, A Berthold, ...
Analytical chemistry 75 (2), 306-312, 2003
1252003
Silicon thermooptical micromodulator with 700-kHz-3-dB bandwidth
G Cocorullo, M Iodice, I Rendina, PM Sarro
IEEE photonics technology letters 7 (4), 363-365, 1995
1201995
Electrothermal microgripper with large jaw displacement and integrated force sensors
TC Duc, GK Lau, JF Creemer, PM Sarro
Journal of microelectromechanical systems 17 (6), 1546-1555, 2008
1152008
Polyimide sacrificial layer and novel materials for post-processing surface micromachining
A Bagolini, L Pakula, TLM Scholtes, HTM Pham, PJ French, PM Sarro
Journal of Micromechanics and Microengineering 12 (4), 385, 2002
1122002
Microfluidic sensor based on integrated optical hollow waveguides
S Campopiano, R Bernini, L Zeni, PM Sarro
Optics letters 29 (16), 1894-1896, 2004
1092004
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