Andrea Illiberi
Andrea Illiberi
Research Scientist, Netherlands Organization for Applied Scientific Research (TNO)
Adresse e-mail validée de tno.nl - Page d'accueil
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Spatial atomic layer deposition of zinc oxide thin films
A Illiberi, F Roozeboom, P Poodt
ACS applied materials & interfaces 4 (1), 268-272, 2012
942012
Low temperature and roll-to-roll spatial atomic layer deposition for flexible electronics
P Poodt, R Knaapen, A Illiberi, F Roozeboom, A van Asten
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 30 (1 …, 2012
632012
Research Update: Atmospheric pressure spatial atomic layer deposition of ZnO thin films: Reactors, doping, and devices
RLZ Hoye, D Muñoz-Rojas, SF Nelson, A Illiberi, P Poodt, F Roozeboom, ...
APL materials 3 (4), 040701, 2015
502015
Spatial Atmospheric Atomic Layer Deposition of AlxZn1–xO
A Illiberi, R Scherpenborg, Y Wu, F Roozeboom, P Poodt
ACS applied materials & interfaces 5 (24), 13124-13128, 2013
452013
Spatial Atmospheric Atomic Layer Deposition of InxGayZnzO for Thin Film Transistors
A Illiberi, B Cobb, A Sharma, T Grehl, H Brongersma, F Roozeboom, ...
ACS applied materials & interfaces 7 (6), 3671-3675, 2015
432015
On the kinetics of spatial atomic layer deposition
P Poodt, J van Lieshout, A Illiberi, R Knaapen, F Roozeboom, A van Asten
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 31 (1 …, 2013
432013
Physical and chemical degradation behavior of sputtered aluminum doped zinc oxide layers for Cu (In, Ga) Se2 solar cells
M Theelen, T Boumans, F Stegeman, F Colberts, A Illiberi, J Van Berkum, ...
Thin solid films 550, 530-540, 2014
412014
Growth of ZnOx: Al by high-throughput CVD at atmospheric pressure
A Illiberi, P Simons, B Kniknie, J Van Deelen, M Theelen, M Zeman, ...
Journal of Crystal Growth 347 (1), 56-61, 2012
372012
Atmospheric pressure plasma enhanced spatial ALD of silver
FJ van den Bruele, M Smets, A Illiberi, Y Creyghton, P Buskens, ...
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 33 (1 …, 2015
362015
Industrial high-rate (∼ 14 nm/s) deposition of low resistive and transparent ZnOx: Al films on glass
A Illiberi, B Kniknie, J Van Deelen, H Steijvers, D Habets, P Simons, ...
Solar energy materials and solar cells 95 (7), 1955-1959, 2011
362011
Effect of ion bombardment on the a-Si:H based surface passivation of -Si surfaces
A Illiberi, P Kudlacek, AHM Smets, M Creatore, MCM Van De Sanden
Applied Physics Letters 98 (24), 242115, 2011
362011
Experimental investigation of the ion resonance instability in a trapped electron plasma
G Bettega, F Cavaliere, M Cavenago, A Illiberi, R Pozzoli, M Romé
Plasma physics and controlled fusion 47 (10), 1697, 2005
332005
Novel approach to thin film polycrystalline silicon on glass
A Illiberi, K Sharma, M Creatore, MCM Van De Sanden
Materials Letters 63 (21), 1817-1819, 2009
312009
Recent Advances in Atmospheric Vapor‐Phase Deposition of Transparent and Conductive Zinc Oxide
A Illiberi, P Poodt, PJ Bolt, F Roozeboom
Chemical Vapor Deposition 20 (7-8-9), 234-242, 2014
272014
On the environmental stability of ZnO thin films by spatial atomic layer deposition
A Illiberi, R Scherpenborg, M Theelen, P Poodt, F Roozeboom
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 31 (6 …, 2013
272013
Atmospheric spatial atomic layer deposition of In-doped ZnO
A Illiberi, R Scherpenborg, F Roozeboom, P Poodt
ECS Journal of Solid State Science and Technology 3 (5), P111, 2014
262014
Experimental investigation of coherent structures in a low-energy electron beam
G Bettega, F Cavaliere, A Illiberi, R Pozzoli, M Romé, M Cavenago, ...
Applied physics letters 84 (19), 3807-3809, 2004
232004
On the effect of the amorphous silicon microstructure on the grain size of solid phase crystallized polycrystalline silicon
K Sharma, A Branca, A Illiberi, FD Tichelaar, M Creatore, ...
Advanced Energy Materials 1 (3), 401-406, 2011
222011
Thermal annealing using ultra-short laser pulses to improve the electrical properties of Al: ZnO thin films
D Scorticati, A Illiberi, TC Bor, SWH Eijt, H Schut, G Römer, ...
Acta materialia 98, 327-335, 2015
172015
Atmospheric spatial atomic layer deposition of Zn (O, S) buffer layer for Cu (In, Ga) Se2 solar cells
CH Frijters, P Poodt, A Illiberi
Solar Energy Materials and Solar Cells 155, 356-361, 2016
162016
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