| Prototype ATLAS IBL modules using the FE-I4A front-end readout chip Atlas Ibl Collaboration Journal of Instrumentation 7 (11), P11010, 2012 | 208 | 2012 |
| Polyimide sacrificial layer and novel materials for post-processing surface micromachining A Bagolini, L Pakula, TLM Scholtes, HTM Pham, PJ French, PM Sarro Journal of Micromechanics and Microengineering 12 (4), 385, 2002 | 137 | 2002 |
| Fabrication of novel MEMS microgrippers by deep reactive ion etching with metal hard mask A Bagolini, S Ronchin, P Bellutti, M Chistè, M Verotti, NP Belfiore Journal of Microelectromechanical Systems 26 (4), 926-934, 2017 | 85 | 2017 |
| Development of micro-grippers for tissue and cell manipulation with direct morphological comparison R Cecchi, M Verotti, R Capata, A Dochshanov, GB Broggiato, R Crescenzi, ... Micromachines 6 (11), 1710-1728, 2015 | 80 | 2015 |
| Slim edges in double-sided silicon 3D detectors M Povoli, A Bagolini, M Boscardin, GF Dalla Betta, G Giacomini, ... Journal of Instrumentation 7 (01), C01015, 2012 | 69 | 2012 |
| Development of double-sided full-passing-column 3D sensors at FBK G Giacomini, A Bagolini, M Boscardin, GF Dalla Betta, F Mattedi, M Povoli, ... IEEE Transactions on Nuclear Science 60 (3), 2357-2366, 2013 | 68 | 2013 |
| Stress characterization of electroplated gold layers for low temperature surface micromachining B Margesin, A Bagolini, V Guarnieri, F Giacomozzi, A Faes, R Pal, ... Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003 …, 2003 | 66 | 2003 |
| Rib waveguides for mid-infrared silicon photonics MM Milošević, PS Matavulj, PY Yang, A Bagolini, GZ Mashanovich JOSA B 26 (9), 1760-1766, 2009 | 56 | 2009 |
| New MEMS tweezers for the viscoelastic characterization of soft materials at the microscale P Di Giamberardino, A Bagolini, P Bellutti, IJ Rudas, M Verotti, F Botta, ... Micromachines 9 (1), 15, 2017 | 46 | 2017 |
| Development of MEMS MOS gas sensors with CMOS compatible PECVD inter-metal passivation A Bagolini, A Gaiardo, M Crivellari, E Demenev, R Bartali, A Picciotto, ... Sensors and Actuators B: Chemical 292, 225-232, 2019 | 45 | 2019 |
| Stress and resistivity analysis of electrodeposited gold films for MEMS application S Kal, A Bagolini, B Margesin, M Zen Microelectronics journal 37 (11), 1329-1334, 2006 | 43 | 2006 |
| PECVD low stress silicon nitride analysis and optimization for the fabrication of CMUT devices A Bagolini, AS Savoia, A Picciotto, M Boscardin, P Bellutti, N Lamberti, ... Journal of Micromechanics and Microengineering 25 (1), 015012, 2014 | 41 | 2014 |
| ⟨ 1 0 0⟩ bar corner compensation for CMOS compatible anisotropic TMAH etching R Mukhiya, A Bagolini, B Margesin, M Zen, S Kal journal of micromechanics and microengineering 16 (11), 2458, 2006 | 41 | 2006 |
| Innovative silicon microgrippers for biomedical applications: Design, mechanical simulation and evaluation of protein fouling C Potrich, L Lunelli, A Bagolini, P Bellutti, C Pederzolli, M Verotti, ... Actuators 7 (2), 12, 2018 | 33 | 2018 |
| Development of planar detectors with active edge M Povoli, A Bagolini, M Boscardin, GF Dalla Betta, G Giacomini, ... Nuclear Instruments and Methods in Physics Research Section A: Accelerators …, 2011 | 32 | 2011 |
| Development of modified 3D detectors at FBK GF Dalla Betta, A Bagolini, M Boscardin, L Bosisio, P Gabos, G Giacomini, ... IEEE Nuclear Science Symposuim & Medical Imaging Conference, 382-387, 2010 | 32 | 2010 |
| Development of edgeless n-on-p planar pixel sensors for future ATLAS upgrades M Bomben, A Bagolini, M Boscardin, L Bosisio, G Calderini, J Chauveau, ... Nuclear Instruments and Methods in Physics Research Section A: Accelerators …, 2013 | 31 | 2013 |
| Optimization of a low-power chemoresistive gas sensor: Predictive thermal modelling and mechanical failure analysis A Gaiardo, D Novel, E Scattolo, M Crivellari, A Picciotto, F Ficorella, ... Sensors 21 (3), 783, 2021 | 30 | 2021 |
| Simulation and construction of a MEMS CSFH based microgripper NP Belfiore, GB Broggiato, M Verotti, M Balucani, R Crescenzi, A Bagolini, ... Int. J. Mech. Control 16 (1), 21-30, 2015 | 29 | 2015 |
| Influence of design and fabrication on RF performance of capacitive RF MEMS switches A Persano, F Quaranta, G Capoccia, E Proietti, A Lucibello, R Marcelli, ... Microsystem Technologies 22, 1741-1746, 2016 | 28 | 2016 |
Maurizio BoscardinFondazione Bruno KesslerVerified email at fbk.eu
