| Bouncing transitions on microtextured materials M Reyssat, A Pépin, F Marty, Y Chen, D Quéré Europhysics Letters 74 (2), 306, 2006 | 482 | 2006 |
| Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro-and nanostructures F Marty, L Rousseau, B Saadany, B Mercier, O Français, Y Mita, ... Microelectronics journal 36 (7), 673-677, 2005 | 385 | 2005 |
| A batch-fabricated and electret-free silicon electrostatic vibration energy harvester P Basset, D Galayko, AM Paracha, F Marty, A Dudka, T Bourouina Journal of Micromechanics and Microengineering 19 (11), 115025, 2009 | 294 | 2009 |
| Microfabricated textured surfaces for super-hydrophobicity investigations M Callies, Y Chen, F Marty, A Pépin, D Quéré Microelectronic engineering 78, 100-105, 2005 | 221 | 2005 |
| Electrostatic vibration energy harvester with combined effect of electrical nonlinearities and mechanical impact P Basset, D Galayko, F Cottone, R Guillemet, E Blokhina, F Marty, ... Journal of Micromechanics and Microengineering 24 (3), 035001, 2014 | 179 | 2014 |
| Les partenariats public-privé F Marty, S Trosa, A Voisin La découverte, 2006 | 155 | 2006 |
| Zinc oxide nano-enabled microfluidic reactor for water purification and its applicability to volatile organic compounds I Azzouz, YG Habba, M Capochichi-Gnambodoe, F Marty, J Vial, ... Microsystems & Nanoengineering 4 (1), 1-7, 2018 | 102 | 2018 |
| MEMS sensors for density–viscosity sensing in a low-flow microfluidic environment I Etchart, H Chen, P Dryden, J Jundt, C Harrison, K Hsu, F Marty, ... Sensors and Actuators A: Physical 141 (2), 266-275, 2008 | 95 | 2008 |
| Free-space tunable and drop optical filters using vertical Bragg mirrors on silicon B Saadany, M Malak, M Kubota, F Marty, Y Mita, D Khalil, T Bourouina IEEE journal of selected topics in quantum electronics 12 (6), 1480-1488, 2006 | 90 | 2006 |
| Employing a MEMS plasma switch for conditioning high-voltage kinetic energy harvesters H Zhang, F Marty, X Xia, Y Zi, T Bourouina, D Galayko, P Basset Nature communications 11 (1), 3221, 2020 | 89 | 2020 |
| A nonlinear MEMS electrostatic kinetic energy harvester for human-powered biomedical devices Y Lu, F Cottone, S Boisseau, F Marty, D Galayko, P Basset Applied Physics Letters 107 (25), 2015 | 85 | 2015 |
| Deep reactive ion etching of sub-micrometer trenches with ultra high aspect ratio J Parasuraman, A Summanwar, F Marty, P Basset, DE Angelescu, ... Microelectronic engineering 113, 35-39, 2014 | 81 | 2014 |
| Electret-free micromachined silicon electrostatic vibration energy harvester with the Bennet’s doubler as conditioning circuit V Dorzhiev, A Karami, P Basset, F Marty, V Dragunov, D Galayko IEEE Electron Device Letters 36 (2), 183-185, 2015 | 79 | 2015 |
| On the optical and morphological properties of microstructured Black Silicon obtained by cryogenic-enhanced plasma reactive ion etching KN Nguyen, P Basset, F Marty, Y Leprince-Wang, T Bourouina Journal of Applied Physics 113 (19), 2013 | 77 | 2013 |
| Highly decoupled single-crystal silicon resonators: An approach for the intrinsic quality factor B Le Foulgoc, T Bourouina, O Le Traon, A Bosseboeuf, F Marty, ... Journal of micromechanics and microengineering 16 (6), S45, 2006 | 77 | 2006 |
| Silica sputtering as a novel collective stationary phase deposition for microelectromechanical system gas chromatography column: Feasibility and first separations J Vial, D Thiébaut, F Marty, P Guibal, R Haudebourg, K Nachef, K Danaie, ... Journal of Chromatography A 1218 (21), 3262-3266, 2011 | 74 | 2011 |
| A vibrating edge supported plate, fabricated by the methods of micro electro mechanical system for the simultaneous measurement of density and viscosity: results for … ARH Goodwin, EP Donzier, O Vancauwenberghe, AD Fitt, KA Ronaldson, ... Journal of Chemical & Engineering Data 51 (1), 190-208, 2006 | 69 | 2006 |
| A batch-fabricated electret-biased wideband MEMS vibration energy harvester with frequency-up conversion behavior powering a UHF wireless sensor node Y Lu, E O’Riordan, F Cottone, S Boisseau, D Galayko, E Blokhina, F Marty, ... Journal of Micromechanics and Microengineering 26 (12), 124004, 2016 | 63 | 2016 |
| On the response of a resonating plate in a liquid near a solid wall C Harrison, E Tavernier, O Vancauwenberghe, E Donzier, K Hsu, ... Sensors and Actuators A: Physical 134 (2), 414-426, 2007 | 61 | 2007 |
| Fabrication of 2-D and 3-D silicon photonic crystals by deep etching A Chelnokov, S David, K Wang, F Marty, JM Lourtioz IEEE Journal of Selected Topics in Quantum Electronics 8 (4), 919-927, 2002 | 56 | 2002 |
Tarik BOUROUINAUniversité Gustave Eiffel, ESIEE Paris, CNRS, ESYCOM Lab.Verified email at esiee.fr
