Costas Spanos
Costas Spanos
Professor of Electrical Engineering and Computer Sciences, University of California, Berkeley
Adresse e-mail validée de berkeley.edu
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Fundamentals of semiconductor manufacturing and process control
GS May, CJ Spanos
IEEE, 2006
4922006
Modeling within-die spatial correlation effects for process-design co-optimization
P Friedberg, Y Cao, J Cain, R Wang, J Rabaey, C Spanos
Sixth international symposium on quality electronic design (isqed'05), 516-521, 2005
2652005
Maintenance unit for a sensor apparatus
ML Freed, RS Mundt, CJ Spanos
US Patent 7,282,889, 2007
253*2007
Specular spectroscopic scatterometry
X Niu, N Jakatdar, J Bao, CJ Spanos
IEEE Transactions on Semiconductor Manufacturing 14 (2), 97-111, 2001
2082001
Distributed energy consumption control via real-time pricing feedback in smart grid
K Ma, G Hu, CJ Spanos
IEEE Transactions on Control Systems Technology 22 (5), 1907-1914, 2014
1602014
Real-time statistical process control using tool data (semiconductor manufacturing)
CJ Spanos, HF Guo, A Miller, J Levine-Parrill
IEEE Transactions on Semiconductor Manufacturing 5 (4), 308-318, 1992
1451992
Measurement and analysis of variability in 45 nm strained-Si CMOS technology
LT Pang, K Qian, CJ Spanos, B Nikolic
IEEE Journal of Solid-State Circuits 44 (8), 2233-2243, 2009
1412009
Statistical experimental design in plasma etch modeling
GS May, J Huang, CJ Spanos
IEEE Transactions on Semiconductor Manufacturing 4 (2), 83-98, 1991
1361991
Model-based fault detection and identification for switching power converters
J Poon, P Jain, IC Konstantakopoulos, C Spanos, SK Panda, SR Sanders
IEEE Transactions on Power Electronics 32 (2), 1419-1430, 2016
1252016
Semiconductor yield improvement: results and best practices
SP Cunningham, CJ Spanos, K Voros
IEEE Transactions on Semiconductor Manufacturing 8 (2), 103-109, 1995
1251995
MOD-DR: Microgrid optimal dispatch with demand response
M Jin, W Feng, P Liu, C Marnay, C Spanos
Applied Energy 187, 758-776, 2017
1232017
Specular spectroscopic scatterometry in DUV lithography
X Niu, NH Jakatdar, J Bao, CJ Spanos, SK Yedur
Metrology, Inspection, and Process Control for Microlithography XIII 3677 …, 1999
1191999
Accurate indoor localization and tracking using mobile phone inertial sensors, WiFi and iBeacon
H Zou, Z Chen, H Jiang, L Xie, C Spanos
2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2017
1112017
Microgrid to enable optimal distributed energy retail and end-user demand response
M Jin, W Feng, C Marnay, C Spanos
Applied Energy 210, 1321-1335, 2018
1092018
Statistical equipment modeling for VLSI manufacturing: An application for LPCVD
KK Lin, CJ Spanos
IEEE Transactions on Semiconductor Manufacturing 3 (4), 216-229, 1990
1031990
Gate line edge roughness model for estimation of FinFET performance variability
K Patel, TJK Liu, CJ Spanos
IEEE Transactions on Electron Devices 56 (12), 3055-3063, 2009
972009
WinLight: A WiFi-based occupancy-driven lighting control system for smart building
H Zou, Y Zhou, H Jiang, SC Chien, L Xie, CJ Spanos
Energy and Buildings 158, 924-938, 2018
952018
Statistical process control in semiconductor manufacturing
CJ Spanos
Proceedings of the IEEE 80 (6), 819-830, 1992
951992
WinIPS: WiFi-based non-intrusive indoor positioning system with online radio map construction and adaptation
H Zou, M Jin, H Jiang, L Xie, CJ Spanos
IEEE Transactions on Wireless Communications 16 (12), 8118-8130, 2017
902017
Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control
ML Freed, RS Mundt, CJ Spanos
US Patent 6,691,068, 2004
862004
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