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Tamer Elazhary
Tamer Elazhary
Optical scientist at Facebook
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Generalized sine condition
TT Elazhary, P Zhou, C Zhao, JH Burge
Applied Optics 54 (16), 5037-5049, 2015
212015
Closed-form sag solutions for Cartesian oval surfaces
CC Hsueh, T Elazhary, M Nakano, J Sasian
Journal of Optics 40, 168-175, 2011
182011
Modeling mask scattered field at oblique incidence
TM Tawfik, AH Morshed, D Khalil
Optical Microlithography XXII 7274, 980-991, 2009
52009
Efficient approach to designing a Schmidt-Cassegrain objective for a remote sensing satellite
TM Tawfik
Applied optics 48 (35), 6832-6840, 2009
42009
Catadioptric optical system with multi-reflection element for high numerical aperture imaging
M Nakano, JM Sasian-Alvarado, TT Elazhary
US Patent 9,329,373, 2016
32016
Toward faster OPC convergence: advanced analysis for OPC iterations and simulation environment
M Bahnas, M Al-Imam, T Tawfik
Photomask Technology 2008 7122, 1320-1330, 2008
32008
Characterizing OPC model accuracy versus lens induced polarization effects in hyper NA immersion lithography
TM Tawfik, E Tejnil
Photomask Technology 2008 7122, 1310-1319, 2008
32008
New approach to determine best beam focus
C Zuniga, TM Tawfik
Optical Microlithography XXII 7274, 887-896, 2009
22009
Analytic optical design of generally non axi-symmetric optical systems
TT Elazhary, P Zhou, C Zhao, J Burge
International Optical Design Conference, ITh2A. 3, 2014
12014
Optical Design Method for Free Form Optics
TT Elazhary, P Zhou, C Zhao, J Burge
Freeform Optics, FM4B. 4, 2013
12013
Modeling the field diffracted from photo mask at oblique incidence
TT Elazhary, AH Morshed, D Khalil
Applied optics 49 (22), 4207-4216, 2010
12010
Optimizing gate layer OPC correction and SRAF placement for maximum design manufacturability
T Brist, L Hong, A Yehia, T Tawfik, S Shang, K Sakajiri, JL Sturtevant
Design for Manufacturability through Design-Process Integration 6521, 488-497, 2007
12007
Optical metrology for stability of beam pointing
T Elazhary, M Hansen, R Huang, A Franklin
International Optical Design Conference, JTu5A. 12, 2017
2017
Hyper NA Catadioptric Imaging Lens
TT Elazhary, M Nakano, M Miyawaki, J Sasián
International Optical Design Conference, IM3B. 1, 2014
2014
Generalized pupil aberrations of optical imaging systems
TT Elazhary
The University of Arizona, 2014
2014
Hyper numerical aperture imaging lens using a thin multi reflection Catadioptric optical element
TT Elazhary, M Nakano, J Sasián
Optics Express 21 (13), 15809-15814, 2013
2013
Improved process window modeling techniques
C Zuniga, T Tawfik
Optical Microlithography XXIII 7640, 1111-1118, 2010
2010
Effect of SRAF placement on process window for technology nodes that uses variable etch bias
AM Seoud, TM Tawfik
Photomask Technology 2009 7488, 1059-1065, 2009
2009
Tamer Mohamed Tawfik Ahmed Mohamed Elazhary
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