reza abdolvand
reza abdolvand
Adresse e-mail validée de eecs.ucf.edu
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High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps
S Pourkamali, A Hashimura, R Abdolvand, GK Ho, A Erbil, F Ayazi
Journal of Microelectromechanical Systems 12 (4), 487-496, 2003
2132003
Thin-film piezoelectric-on-silicon resonators for high-frequency reference oscillator applications
R Abdolvand, HM Lavasani, GK Ho, F Ayazi
IEEE transactions on ultrasonics, ferroelectrics, and frequency control 55 …, 2008
2012008
Piezoelectric-on-silicon lateral bulk acoustic wave micromechanical resonators
GK Ho, R Abdolvand, A Sivapurapu, S Humad, F Ayazi
Journal of microelectromechanical systems 17 (2), 512-520, 2008
1842008
Piezoelectric on semiconductor-on-insulator microelectromechanical resonators
F Ayazi, G Piazza, R Abdolvand, GK Ho, S Humad
US Patent 6,909,221, 2005
1572005
A 4.5-mW Closed-Loop Micro-Gravity CMOS SOI Accelerometer
BV Amini, R Abdolvand, F Ayazi
IEEE Journal of Solid-State Circuits 41 (12), 2983-2991, 2006
1492006
An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon
R Abdolvand, F Ayazi
Sensors and Actuators A: Physical 144 (1), 109-116, 2008
1482008
Sub-micro-gravity in-plane accelerometers with reduced capacitive gaps and extra seismic mass
R Abdolvand, BV Amini, F Ayazi
Journal of microelectromechanical systems 16 (5), 1036-1043, 2007
1342007
In-plane acoustic reflectors for reducing effective anchor loss in lateral–extensional MEMS resonators
BP Harrington, R Abdolvand
Journal of Micromechanics and Microengineering 21 (8), 085021, 2011
1262011
Voltage-tunable piezoelectrically-transduced single-crystal silicon micromechanical resonators
G Piazza, R Abdolvand, GK Ho, F Ayazi
Sensors and Actuators A: Physical 111 (1), 71-78, 2004
1192004
Micromachined resonators: A review
R Abdolvand, B Bahreyni, JEY Lee, F Nabki
Micromachines 7 (9), 160, 2016
992016
Methods of forming oxide masks with submicron openings and microstructures formed thereby
F Ayazi, R Abdolvand, SP Anaraki
US Patent 7,056,757, 2006
952006
High frequency micromechanical piezo-on-silicon block resonators
S Humad, R Abdolvand, GK Ho, G Piazza, F Ayazi
IEEE International Electron Devices Meeting 2003, 39.3. 1-39.3. 4, 2003
902003
Quality factor in trench-refilled polysilicon beam resonators
R Abdolvand, H Johari, GK Ho, A Erbil, F Ayazi
Journal of Microelectromechanical Systems 15 (3), 471-478, 2006
892006
Piezo-on-diamond resonators and resonator systems
F Ayazi, R Abdolvand
US Patent 7,812,692, 2010
762010
A 76 dB1.7 GHz 0.18m CMOS Tunable TIA Using Broadband Current Pre-Amplifier for High Frequency Lateral MEMS Oscillators
HM Lavasani, W Pan, B Harrington, R Abdolvand, F Ayazi
IEEE journal of solid-state circuits 46 (1), 224-235, 2010
672010
High-order composite bulk acoustic resonators
GK Ho, R Abdolvand, F Ayazi
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems …, 2007
552007
Single-resonator dual-frequency lateral-extension mode piezoelectric oscillators, and operating methods thereof
F Ayazi, R Abdolvand, SHM Lavasani
US Patent 7,800,282, 2010
542010
Toward ultimate performance in GHZ MEMS resonators: Low impedance and high Q
BP Harrington, M Shahmohammadi, R Abdolvand
2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems …, 2010
542010
Thermoelastic damping in trench-refilled polysilicon resonators
R Abdolvand, GK Ho, A Erbil, F Ayazi
TRANSDUCERS'03. 12th International Conference on Solid-State Sensors …, 2003
522003
7E-4 enhanced power handling and quality factor in thin-film piezoelectric-on-substrate resonators
R Abdolvand, F Ayazi
2007 IEEE Ultrasonics Symposium Proceedings, 608-611, 2007
502007
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