| LIGA micropump for gases and liquids R Rapp, WK Schomburg, D Maas, J Schulz, W Stark Sensors and Actuators A: Physical 40 (1), 57-61, 1994 | 218 | 1994 |
| Experimental results from a preclinical X-ray phase-contrast CT scanner A Tapfer, M Bech, A Velroyen, J Meiser, J Mohr, M Walter, J Schulz, ... Proceedings of the National Academy of Sciences 109 (39), 15691-15696, 2012 | 182 | 2012 |
| Radially polarized 3kW beam from a CO2 laser with an intracavity resonant grating mirror MA Ahmed, J Schulz, A Voss, O Parriaux, JC Pommier, T Graf Optics Letters 32 (13), 1824-1826, 2007 | 130 | 2007 |
| High aspect ratio gratings for X-ray phase contrast imaging J Mohr, T Grund, D Kunka, J Kenntner, J Leuthold, J Meiser, J Schulz, ... AIP Conference proceedings 1466 (1), 41-50, 2012 | 100 | 2012 |
| Fully batch fabricated magnetic microactuators using a two layer LIGA process B Rogge, J Schulz, J Mohr, A Thommes, W Menz Proceedings of the International Solid-State Sensors and Actuators …, 1995 | 62 | 1995 |
| Development of a prototype gantry system for preclinical x‐ray phase‐contrast computed tomography A Tapfer, M Bech, B Pauwels, X Liu, P Bruyndonckx, A Sasov, J Kenntner, ... Medical physics 38 (11), 5910-5915, 2011 | 59 | 2011 |
| DoseSim: Microsoft-Windows graphical user interface for using synchrotron x-ray exposure and subsequent development in the LIGA process P Meyer, J Schulz, L Hahn Review of Scientific Instruments 74 (2), 1113-1119, 2003 | 50 | 2003 |
| Adhesion problems in deep-etch X-ray lithography caused by fluorescence radiation from the plating base FJ Pantenburg, J Chlebek, A El-Kholi, HL Huber, J Mohr, HK Oertel, ... Microelectronic Engineering 23 (1-4), 223-226, 1994 | 49 | 1994 |
| Investigations of the development rate of irradiated PMMA microstructures in deep X-ray lithography P Meyer, A El-Kholi, J Schulz Microelectronic Engineering 63 (4), 319-328, 2002 | 47 | 2002 |
| Gas permeability of adhesives and their application for hermetic packaging of microcomponents A Gerlach, W Keller, J Schulz, K Schumacher Microsystem Technologies 7, 17-22, 2001 | 43 | 2001 |
| Deep x-ray lithography P Meyer, J Schulz, V Saile Micromanufacturing Engineering and Technology, 365-391, 2010 | 33 | 2010 |
| Increasing the field of view in grating based X-ray phase contrast imaging using stitched gratings J Meiser, M Willner, T Schröter, A Hofmann, J Rieger, F Koch, ... Journal of X-ray science and technology 24 (3), 379-388, 2016 | 32 | 2016 |
| Why you will use the deep X-ray LIG (A) technology to produce MEMS? P Meyer, J Schulz, L Hahn, V Saile Microsystem Technologies 14, 1491-1497, 2008 | 29 | 2008 |
| Lithographic fabrication of mold inserts M Guttmann, J Schulz, V Saile Advanced Micro and Nanosystems 3. Microengineering of Metals and Ceramics, 2005 | 27 | 2005 |
| Note: Gratings on low absorbing substrates for x-ray phase contrast imaging FJ Koch, TJ Schröter, D Kunka, P Meyer, J Meiser, A Faisal, MI Khalil, ... Review of Scientific Instruments 86 (12), 2015 | 24 | 2015 |
| LIGA technology today and its industrial applications SJ Chung, H Hein, J Mohr, FJ Pantenburg, J Schulz, U Wallrabe Microrobotics and Microassembly II 4194, 44-55, 2000 | 23 | 2000 |
| Radially polarized high-power lasers MA Ahmed, A Voß, MM Vogel, A Austerschulte, J Schulz, V Metsch, ... XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power …, 2009 | 22 | 2009 |
| Magnetic microactuators fabricated by the LIGA-technique for large displacements or large forces B Rogge, J Schulz, J Mohr, A Thommes, W Menz Proc. Actuator 96, 112-115, 1996 | 19 | 1996 |
| Characterization method for new resist formulations for HAR patterns made by X-ray lithography D Kunka, J Mohr, V Nazmov, J Meiser, P Meyer, M Amberger, F Koch, ... Microsystem technologies 20, 2023-2029, 2014 | 18 | 2014 |
| Development and characterization of ultra high aspect ratio microstructures made by ultra deep X-ray lithography V Nazmov, E Reznikova, J Mohr, J Schulz, A Voigt Journal of Materials Processing Technology 225, 170-177, 2015 | 16 | 2015 |
