Numerical analysis of a slit-groove diffraction problem P Lalanne, M Besbes, JP Hugonin, S Van Haver, OTA Janssen, ... Journal of the European Optical Society-Rapid Publications 2, 2007 | 134 | 2007 |
Assessment of optical systems by means of point-spread functions JJM Braat, S van Haver, AJEM Janssen, P Dirksen Progress in optics 51, 349-468, 2008 | 90 | 2008 |
Extended Nijboer–Zernike approach to aberration and birefringence retrieval in a high-numerical-aperture optical system JJM Braat, P Dirksen, AJEM Janssen, S van Haver, AS van de Nes JOSA A 22 (12), 2635-2650, 2005 | 49 | 2005 |
High-NA aberration retrieval with the extended Nijboer-Zernike vector diffraction theory S van Haver, JJM Braat, P Dirksen, AJEM Janssen Journal of the European Optical Society-Rapid publications 1, 2006 | 33 | 2006 |
Zernike representation and Strehl ratio of optical systems with variable numerical aperture AJEM Janssen, S van Haver, P Dirksen, JJM Braat Journal of Modern Optics 55 (7), 1127-1157, 2008 | 31 | 2008 |
Advanced analytic treatment and efficient computation of the diffraction integrals in the extended Nijboer-Zernike theory S Van Haver, A Janssen Journal of the European Optical Society-Rapid publications 8, 2013 | 27 | 2013 |
The extended Nijboer-Zernike diffraction theory and its applications S Van Haver | 25 | 2010 |
Strehl ratio and optimum focus of high-numerical-aperture beams AJEM Janssen, S van Haver, JJM Braat, P Dirksen Journal of the European Optical Society-Rapid publications 2, 2007 | 16 | 2007 |
Extended Nijboer-Zernike (ENZ) based mask imaging: efficient coupling of electromagnetic field solvers and the ENZ imaging algorithm OTA Janssen, S van Haver, AJEM Janssen, JJM Braat, HP Urbach, ... Optical Microlithography XXI 6924, 363-371, 2008 | 15 | 2008 |
Image formation in a multilayer using the extended Nijboer-Zernike theory JJM Braat, S van Haver, A Janssen, SF Pereira Journal of the European Optical Society-Rapid Publications 4, 2009 | 14 | 2009 |
Vectorial aerial-image computations of three-dimensional objects based on the extended Nijboer-Zernike theory S Van Haver, JJM Braat, A Janssen, OTA Janssen, SF Pereira JOSA A 26 (5), 1221-1234, 2009 | 13 | 2009 |
Energy and momentum flux in a high-numerical-aperture beam using the extended Nijboer-Zernike diffraction formalism JJM Braat, S van Haver, AJEM Janssen, P Dirksen Journal of the European Optical Society-Rapid Publications 2, 2007 | 11 | 2007 |
Methods and patterning devices for measuring phase aberration WMJM Coene, S Van Haver US Patent 9,201,311, 2015 | 10 | 2015 |
General imaging of advanced 3D mask objects based on the fully-vectorial extended Nijboer-Zernike (ENZ) theory S van Haver, OTA Janssen, JJM Braat, AJEM Janssen, HP Urbach, ... Optical Microlithography XXI 6924, 288-295, 2008 | 10 | 2008 |
Analytic expressions and approximations for the on-axis, aberration-free Rayleigh and Debye integral in the case of focusing fields on a circular aperture R Aarts, JJM Braat, P Dirksen, S van Haver, C van Heesch, A Janssen Journal of the European Optical Society-Rapid Publications 3, 2008 | 7 | 2008 |
Detailed description of the ENZ approach JJM Braat, P Dirksen, S van Haver, A Janssen | 5 | 2013 |
High-NA aberration retrieval with the extended Nijboer-Zernike vector diffraction theory-Erratum S Van Haver, JJM Braat, P Dirksen, A Janssen Journal of the European Optical Society-Rapid publications 2, 2007 | 5 | 2007 |
Truncation of the series expressions in the advanced ENZ-theory of diffraction integrals S Van Haver, A Janssen Journal of The European Optical Society-Rapid Publications 9, 2014 | 4 | 2014 |
Analytical expressions for diffraction-free beams through an opaque disk Q Huang, S Coëtmellec, F Duval, A Louis, H Leblond, M Brunel Journal of the European Optical Society: Rapid publications 6, 11031, 2011 | 4 | 2011 |
Wafer-based aberration metrology for lithographic systems using overlay measurements on targets imaged from phase-shift gratings S van Haver, WMJ Coene, K D’havé, N Geypen, P Van Adrichem, ... Applied Optics 53 (12), 2562-2582, 2014 | 3 | 2014 |