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Wei-Ting Yang
Wei-Ting Yang
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A Structured Data-Driven Framework for Virtual Metrology Modeling
WT Yang, J Blue, A Roussy, J Pinaton, MS Reis
IEEE Transactions on Automation Science and Engineering 17 (3), 1297-1306, 2019
212019
An interpretable unsupervised Bayesian network model for fault detection and diagnosis
WT Yang, MS Reis, V Borodin, M Juge, A Roussy
Control Engineering Practice 127, 105304, 2022
172022
A physics-informed Run-to-Run control framework for semiconductor manufacturing
WT Yang, J Blue, A Roussy, J Pinaton, MS Reis
Expert Systems with Applications 155, 113424, 2020
122020
Virtual metrology modeling based on gaussian bayesian network
WT Yang, J Blue, A Roussy, MS Reis, J Pinaton
2018 Winter Simulation Conference (WSC), 3574-3582, 2018
52018
Advanced run-to-run controller in semiconductor manufacturing with real-time equipment condition
WT Yang, J Blue, A Roussy, M Reis, J Pinaton
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC …, 2018
22018
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