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Rob Wolters
Rob Wolters
Adresse e-mail validée de utwente.nl
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Low-cost and nanoscale non-volatile memory concept for future silicon chips
MHR Lankhorst, BW Ketelaars, RAM Wolters
Nature materials 4 (4), 347-352, 2005
12462005
Read-proof hardware from protective coatings
P Tuyls, GJ Schrijen, B Skoric, J Van Geloven, N Verhaegh, R Wolters
Ches 6, 369-383, 2006
5332006
Selective deposition of tungsten
AY Kovalgin, M Yang, AAI Aarnink, RAM Wolters
US Patent 10,714,385, 2020
2422020
Transition metal silicides in silicon technology
AH Reader, AH Van Ommen, PJW Weijs, RAM Wolters, DJ Oostra
Reports on Progress in Physics 56 (11), 1397, 1993
2181993
Transition metal silicides in silicon technology
AH Reader, AH Van Ommen, PJW Weijs, RAM Wolters, DJ Oostra
Reports on Progress in Physics 56 (11), 1397, 1993
2181993
Fabrication and characterization of the charge-plasma diode
B Rajasekharan, RJE Hueting, C Salm, T Van Hemert, RAM Wolters, ...
IEEE electron device letters 31 (6), 528-530, 2010
2152010
Lithographic apparatus and device manufacturing method
EAF Van Der Pasch, EJM Eussen
US Patent 7,602,489, 2009
1452009
Selective deposition of tungsten
AY Kovalgin, M Yang, AAI Aarnink, RAM Wolters
US Patent App. 16/926,192, 2020
1172020
A self‐aligned cobalt silicide technology using rapid thermal processing
L Van den Hove, R Wolters, K Maex, R De Keersmaecker, G Declerck
Journal of Vacuum Science & Technology B: Microelectronics Processing and …, 1986
1061986
Systematic TLM measurements of NiSi and PtSi specific contact resistance to n-and p-type Si in a broad doping range
N Stavitski, MJH Van Dal, A Lauwers, C Vrancken, AY Kovalgin, ...
IEEE electron device letters 29 (4), 378-381, 2008
1022008
Method of manufacturing a semiconductor device comprising capacitors which form memory elements and comprise a ferroelectric dielectric material having multilayer lower and …
RAM Wolters, MJE Ulenaers
US Patent 5,122,477, 1992
801992
Columnar microstructures in magnetron-sputtered refractory metal thin films of tungsten, molybdenum and W-Ti-(N)
AG Dirks, RAM Wolters, AEM De Veirman
Thin Solid Films 208 (2), 181-188, 1992
781992
On the microstructure-property relationship of WTi (N) diffusion barriers
AG Dirks, RAM Wolters, AJM Nellissen
Thin Solid Films 193, 201-210, 1990
721990
A self-aligned CoSi2interconnection and contact technology for VLSI applications
R Wolters, K Maex, RF De Keersmaecker, GJ Declerck
IEEE transactions on electron devices 34 (3), 554-561, 1987
711987
Growth kinetics and oxidation mechanism of ALD TiN thin films monitored by in situ spectroscopic ellipsometry
H Van Bui, AW Groenland, AAI Aarnink, RAM Wolters, J Schmitz, ...
Journal of the Electrochemical Society 158 (3), H214, 2011
662011
Cross-bridge Kelvin resistor structures for reliable measurement of low contact resistances and contact interface characterization
N Stavitski, JH Klootwijk, HW van Zeijl, AY Kovalgin, RAM Wolters
IEEE transactions on semiconductor manufacturing 22 (1), 146-152, 2009
622009
Cross-bridge Kelvin resistor structures for reliable measurement of low contact resistances and contact interface characterization
N Stavitski, JH Klootwijk, HW van Zeijl, AY Kovalgin, RAM Wolters
IEEE transactions on semiconductor manufacturing 22 (1), 146-152, 2009
622009
Evidence of the thermo-electric Thomson effect and influence on the program conditions and cell optimization in phase-change memory cells
DT Castro, L Goux, GAM Hurkx, K Attenborough, R Delhougne, J Lisoni, ...
2007 IEEE International Electron Devices Meeting, 315-318, 2007
622007
Nature Mater. 4, 347 (2005)
MHR Lankhorst, B Ketelaars, RAM Wolters
582008
Method, apparatus and system for verifying authenticity of an object
PT Tuyls, B Skoric, SJ Maubach, RAM Wolters
US Patent 8,886,951, 2014
522014
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